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| Brand | Hitachi |
|---|---|
| Origin | Japan |
| Model | SU8600 Series |
| Instrument Type | Floor-Standing SEM |
| Electron Gun | Cold Field Emission |
| Secondary Electron Resolution | 0.6 nm @ 15 kV |
| Magnification Range | 20× to 2,000,000× |
| Accelerating Voltage | 0.5–30 kV |
| Landing Voltage | 0.01–20 kV |
| Maximum Sample Diameter | φ150 mm |
| Detector Options | UD (with ExB energy filter), LD, TD (with energy filter), IMD, PD-BSED, OCD, CLD, STEM Detector |
| Stage | 5-Axis Motorized (X: 0–110 mm, Y: 0–110 mm, Z: 1.5–40 mm, Tilt: −5° to +70°, Rotation: 360°) |
| Software | EM Flow Creator, HD Capture (up to 40,960 × 30,720 px) |
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