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Aibona Micro-Nano Technology (Jiangsu) Co., Ltd.

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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Country of OriginChina
ModelABN-500-Y1
Vacuum Base Pressure≤4×10⁻⁵ Pa
Pump-Down Time≤30 min to 5×10⁻⁴ Pa
Thickness Uniformity±3% (max deviation ±5%)
Thickness Control Accuracy±5%
Deposition RateUp to 5 nm/s (material- and source-dependent)
Process Duration Range0–30 min
CoolingWater-cooled electrodes and chamber flanges
Safety InterlocksVacuum, overcurrent, and cooling water flow monitoring
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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Origin CategoryDomestic (China)
ModelABN-GN
PriceUSD 42,000 (FOB Jiangsu)
Translation StageMotorized or Manual Precision Linear Translation Stage
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BrandAbner
OriginJiangsu, China
ModelABN-PCM-001
Instrument TypeBenchtop Low-Temperature RF Plasma Surface Treater
Working GasesDual-Channel (Ar, O₂, N₂, H₂, CF₄ compatible)
Control MethodDual-Independent Mass Flow Control
Chamber MaterialFused Quartz
Vacuum SystemIntegrated Rotary Vane Pump (Ultimate Pressure ≤ 5 × 10⁻² mbar)
RF Power Supply13.56 MHz, 0–100 W Adjustable
Chamber Volume8 L
Operating TemperatureAmbient to 60 °C (non-thermal plasma regime)
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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Country of OriginChina
ModelABN-500-Y2
Base PriceUSD 67,000 (FOB Jiangsu)
Operating Pressure Range5×10⁻⁵ Pa – 5×10⁻³ Pa
Gas Inlets2 independent MFC-controlled channels
Substrate HeatingRT to 300 °C
Max DC/RF Current0.1–100 A
RF Power Stability≤5%
Target Diameter6 inch
Uniformity±3% over Ø100 mm substrate
Compatible Power ModesDC, RF, Pulsed DC
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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Country of OriginChina
Instrument CategoryVacuum Glove Box
Application TypeProduction-Scale Glove Box
Chamber MaterialStainless Steel (304)
Dimensions (L×W×H)1120 × 740 × 900 mm
ConditionRefurbished, 98% New
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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Product OriginDomestic (China)
ModelEI Series
PricingAvailable Upon Request
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BrandAbner
OriginJiangsu, China
Manufacturer TypeAuthorized Distributor
Product OriginDomestic (China)
ModelAbner Heating Stage
PriceUSD 590 (FOB Jiangsu)
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BrandULVAC
ModelEI-5Z
Evaporation SourcesDual-mode (Electron Beam + Resistive Thermal)
Substrate Compatibility2–8 inch wafers (Si, GaAs, glass, ceramics)
Base Pressure≤3.0 × 10⁻⁵ Pa
Pumping SpeedAchieves 3.0 × 10⁻⁴ Pa in ≤20 min
Thickness Uniformity±5% across substrate
Control SystemFully Automated PLC-Based Interface
Chamber ConfigurationVertical-Incidence Deposition
Optional IntegrationWall-Through (Penetrating) Design
Material CompatibilityAu, Ag, Al, Cr, Ni, Ti, ITO, SiO₂, Al₂O₃, and other conductive/insulating evaporants
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