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| Brand | Oxford Instruments |
|---|---|
| Model | Plasmalab 133 |
| Maximum Wafer Size | 300 mm (330 mm chuck) |
| RF Power | 600 W, 13.56 MHz |
| Electrode Temperature Control | 10 °C – 80 °C (water-cooled) |
| Endpoint Detection | Verity Optical Emission Spectroscopy (OES), 200–800 nm |
| Gas Delivery | 8-line manifold with 7 Mass Flow Controllers (MFCs): Ar (100 sccm), Cl₂ (100 sccm), BCl₃ (100 sccm), N₂O (200 sccm), CHF₃ (200 sccm), NH₃ (100 sccm), CH₄ (50 sccm) |
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