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| Brand | Abner |
|---|---|
| Origin | Jiangsu, China |
| Model | ABN-PCM-001 |
| Instrument Type | Benchtop Low-Temperature RF Plasma Surface Treater |
| Working Gases | Dual-Channel (Ar, O₂, N₂, H₂, CF₄ compatible) |
| Control Method | Dual-Independent Mass Flow Control |
| Chamber Material | Fused Quartz |
| Vacuum System | Integrated Rotary Vane Pump (Ultimate Pressure ≤ 5 × 10⁻² mbar) |
| RF Power Supply | 13.56 MHz, 0–100 W Adjustable |
| Chamber Volume | 8 L |
| Operating Temperature | Ambient to 60 °C (non-thermal plasma regime) |
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