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| Brand | Metrolux |
|---|---|
| Origin | Germany |
| Model | ML6500 |
| Wavelength Range | 115–230 nm (single lamp), 115–320 nm (dual lamp: D₂ + Xe) |
| Spectral Resolution | < 1 nm FWHM at 160 nm |
| Wavelength Reproducibility | < 0.1 nm (validated at 121.5 nm and 160 nm) |
| Operating Pressure | < 1×10⁻⁵ mbar |
| Transmittance Accuracy | < ±0.3% |
| Reflectance Accuracy | < ±0.5% |
| Out-of-Band Transmittance | < 0.1% |
| Scattered Reflectance (157 nm) | > 0.001% |
| Diffuse Reflectance (157 nm, 1 mm aperture) | < 5% |
| Scattered Reflectance (157 nm, 1 mm aperture) | < 5% |
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