Empowering Scientific Discovery

BoDong Company (Pfeiffer Vacuum Germany)

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BrandNS (Japan)
OriginJapan
Model20-M/NS-12
Etching PrincipleKaufman-Type Ion Beam Etching (Physical Sputtering)
Substrate Capacity12 × 4-inch wafers OR 3 × 18-inch substrates
Ion Source20 cm Diameter Kaufman Ion Source (KRI Original, WELL-5100 Power Supply Standard)
Sample StageDirect Liquid-Cooled Electrode with Planetary Rotation (Rotation + Revolution)
Beam Tilt AdjustmentMotorized ±15° Continuous Adjustment
Cooling MethodIntegrated Direct Chilled Stage (Temperature Control Enabled During Etch)
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BrandNS
OriginJapan
ModelNS-12
Etching PrincipleBroad-Beam Ion Beam Etching (IBE)
Substrate Capacity12 × Ø4″ wafers or 3 × Ø18″ wafers
CoolingDirect substrate cooling via chilled chuck
Ion Source20 cm Kaufman-type ion source (original equipment from Kimball Physics / formerly Kaufman & Robinson)
Beam SteeringAdjustable incidence angle (0°–75°)
Rotation MechanismIndependent planetary rotation (substrate rotation + revolution)
Residue-Free ProcessingYes
Power Supply CompatibilityDual-voltage input (100 V / 200 V AC, 50/60 Hz)
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