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| Brand | KRI (Kaufman & Robinson, Inc.) |
|---|---|
| Origin | USA |
| Model | RFICP40 |
| Ion Beam Current | Up to 1.2 A (typical, scalable by aperture and gas flow) |
| Operating Gases | Ar, O₂, N₂, Xe, or mixtures |
| RF Frequency | 13.56 MHz |
| Nominal Beam Energy Range | 50–1500 eV (adjustable via extraction voltage) |
| Extraction Aperture Diameter | 40 mm |
| Vacuum Compatibility | ≤5×10⁻⁴ Torr (base pressure), ≥1×10⁻³ Torr (operational) |
| Cooling | Water-cooled anode and cathode assembly |
| Compliance | CE-marked, RoHS-compliant, compatible with ISO 9001-certified vacuum integration workflows |
| Brand | BOE-THERM |
|---|---|
| Origin | Denmark |
| Model | Temp 150 |
| Max Operating Temperature | 150°C (±0.8°C) |
| Heating Power | 3 kW (expandable to 6 kW / 9 kW) |
| Oil Tank Capacity | 14 L (3 kW) / 19 L (6–9 kW) |
| Pump Pressure | 3.8–4.4 bar (up to 6.0 bar with TM8 pump) |
| Flow Rate | 60–80 L/min |
| Cooling Capacity | 23 kW (standard) / 35 kW (enhanced heat exchanger) |
| Control Interface | 4–20 mA analog input/output, MODBUS RTU, Profibus-DP V1, Ethernet/IP, PROFINET with IRT |
| Safety Certifications | CE (EN 60204-1:2018), ISO 9001:2015, optional ATEX Ex d IIB T4 |
| IP Rating | IP54 (standard control cabinet), IP65 (optional) |
| Noise Level | ≤60 dB(A) |
| Thermal Loss | <5% |
| Power Supply | 3-phase 400 V / 50 Hz or 480 V / 60 Hz (customizable) |
| Brand | Kaufman & Robinson (KRi) |
|---|---|
| Origin | USA |
| Model | eH Series |
| Type | Ungridded End-Hall Ion Source |
| Operating Principle | Magnetron-sustained plasma discharge with axial magnetic field and radial electric field |
| Typical Ion Energy Range | 20–150 eV |
| Max. Beam Current | Up to 2.5 A (dependent on gas, pressure, and geometry) |
| Gas Compatibility | Ar, Xe, O₂, N₂, CF₄, and other process gases |
| Cooling | Water-cooled anode and cathode assembly |
| Mounting Flange | Conflat (CF) 63 or CF 100 standard |
| Compliance | Designed for integration into UHV and HV vacuum systems per ISO 3529-2, ASTM F1875, and SEMI S2/S8 safety guidelines |
| Brand | BOE-THERM |
|---|---|
| Origin | Denmark |
| Model | TEMP 350 |
| Max. Operating Temperature | 350°C (±1.2°C PID control) |
| Heating Power Options | 9–36 kW |
| Thermal Fluid | YD-450 series synthetic heat transfer oil |
| Insulation Efficiency | <2.5% heat loss |
| System Pressure | Micro-positive pressure ≤4.5 bar |
| Noise Level | ≤55 dB(A) |
| Protection Rating | IP54 (control cabinet) / IP66 (heating chamber) |
| Pump Types | P3 (≤18 kW) / P4 (≤36 kW) |
| Max. Flow Rate | 66 L/min |
| Max. Discharge Pressure | 3.4 bar (P3) / 4.4 bar (P4) |
| Cooling Capacity at ΔT=250°C | 36 kW (I2) / 72 kW (I4) |
| Heat Exchange Area | 3.2 m² (I2) / 6.4 m² (I4) |
| Electrical Supply | 3-phase 400 V, 50 Hz (optional 480 V, 60 Hz) |
| Certifications | CE (EN 60204-1:2018, EN 60519-1:2015), ATEX II 2G Ex db IIC T4, PED 2014/68/EU, ISO 9001:2015 |
| Brand | KRI (Kaufman) |
|---|---|
| Origin | USA |
| Model | RFICP 200 HO |
| Discharge Type | RF Inductive |
| Filamentless Operation | Yes |
| RF Power Input | >1 kW |
| Ion Optics | OptiBeam™ Grid Assembly |
| Grid Configuration | Application-Specific, Self-Aligning |
| Neutralizer | Integrated (Optional) |
| Cooling | Water-Cooled |
| Beam Options | Collimated, Convergent, Divergent |
| Compliance | Designed for UHV-compatible vacuum systems (≤1×10⁻⁷ Torr operating base pressure) |
| Brand | BOE-THERM |
|---|---|
| Origin | Denmark |
| Model | Temp_160S_Touch |
| Max. Operating Temperature | 160°C (±0.5°C) |
| Heating Power | 4.5 kW (expandable to 9/13.5/18 kW) |
| Pump Type | Magnetically Driven Centrifugal Pump (Q9) |
| Max. Flow Rate | 90 L/min |
| Max. Pressure | 8.0 bar |
| Cooling Capacity (B4) | 81 kW |
| Heat Transfer Medium | Ultrapure Water (>15 MΩ·cm) |
| System Volume | 6 L (with expansion compensation) |
| Power Supply | 3-phase 400 V / 50 Hz or 460 V / 60 Hz |
| Dimensions (L×W×H) | 680 × 270 × 640 mm |
| Noise Level | ≤65 dB(A) at 1 m |
| Certifications | CE (2014/35/EU), UL (E492831), ISO 9001:2015 |
| Brand | Kaufman & Robinson, Inc. (KRi) |
|---|---|
| Origin | USA |
| Model | EH200 |
| Type | End-Hall Ion Source |
| Application | Ion Beam Etching (IBE), Pre-deposition Substrate Cleaning, Ion-Assisted Deposition (IBAD), Ion Beam Sputtering (IBS), Direct Ion Plating (DIP) |
| Operating Gas | Argon (Ar), Oxygen (O₂), Nitrogen (N₂), or mixtures |
| Typical Beam Voltage | 50–1,200 V |
| Typical Beam Current | 0.1–4.0 A |
| Nominal Beam Power | Up to 3.5 kW |
| Ion Beam Diameter (at 10 cm) | ~80–120 mm |
| Cooling | Conduction-cooled (water-cooled optional) |
| Interface | CF-63 or CF-100 flange mount |
| Control | Analog 0–10 V / 4–20 mA or RS-232/RS-485 (with optional digital controller) |
| Compliance | CE-marked |
| Brand | Kaufman |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | RFICP |
| Pricing | Upon Request |
| Discharge Type | RF (Radio Frequency) |
| Anode Configuration | RF Electrode |
| Beam Current Range | 100–1500 mA |
| Ion Kinetic Energy | 100–1200 V |
| Grid Diameter | 4–30 cm |
| Beam Modes | Focused, Collimated, Divergent |
| Gas Compatibility | Ar, Kr, Xe, O₂, N₂, H₂, and other process gases |
| Operating Pressure | < 0.5 mTorr |
| Neutralizer | LFN-2000 |
| Length | 12.7–39 cm |
| Diameter | 13.5–59 cm |
| Flow Rate | 3–50 sccm |
| Brand | Kaufman & Robinson, Inc. (KRI) |
|---|---|
| Origin | USA |
| Model | RFICP 325 |
| Type | RF Inductively Coupled Plasma Ion Source |
| Grid Configuration | E22 Gridded |
| Beam Coverage | Up to 1650 mm substrate holder diameter |
| Application | Ion Beam Assisted Deposition (IBAD) and Pre-deposition Substrate Cleaning |
| Brand | KRI (Kaufman & Robinson, Inc.) |
|---|---|
| Origin | USA |
| Model | RFICP 140 |
| Anode RF Power | 1 kW @ 1.8 MHz |
| Max. Beam Current | >500 mA |
| Acceleration Voltage Range | 100–1200 V |
| Ion Energy Range | 100–1200 eV |
| Beam Aperture Diameter | 14 cm |
| Grid Material | Molybdenum or Graphite |
| Gas Compatibility | Ar, O₂, N₂, and other process gases |
| Gas Flow Rate | 5–40 sccm |
| Operating Pressure | < 0.5 mTorr |
| Neutralizer | LFN 2000 |
| Dimensions (H × D) | 25.1 cm × 24.6 cm |
| Flange | 12″ Conflat (CF) |
| Brand | Gel-Pak |
|---|---|
| Origin | USA |
| Model | LCS2 |
| ESD Rating | Class 000 (≤100 Ω/sq) |
| Compatible Tray Standard | Industry-standard 2-inch, 3-inch, 4-inch, and 6-inch wafer-style waffle trays (e.g., Gel-Box™, Gel-Tray®) |
| Sealing Mechanism | Mechanical compression clamp with integrated static-dissipative interleaf |
| Material Compliance | Silicon-free, ultra-clean, ISO Class 5-compatible assembly |
| Interleaf Options | Antistatic Tyvek® or ultra-pure black static-dissipative polystyrene |
| Warpage Compensation | Up to ±0.3 mm tray lid-to-tray planarity mismatch |
| Brand | KRI (Kaufman & Robinson, Inc.) |
|---|---|
| Origin | USA |
| Model | EH1020F |
| Type | End-Hall Ion Source (Ungridded Hall-Effect Ion Source) |
| Beam Current Range | 0.1–2.5 A (adjustable) |
| Operating Voltage | 50–150 V (DC) |
| Gas Compatibility | Ar, O₂, N₂, Xe, or mixed gases |
| Typical Anode Power | 50–300 W |
| Cooling | Conduction-cooled (water-cooling optional) |
| Flange Interface | CF-63 or CF-100 (customizable) |
| Lifetime | >10,000 hours (under nominal operating conditions) |
| Compliance | CE-marked, RoHS-compliant, compatible with UHV and HV vacuum systems (≤1×10⁻⁷ mbar base pressure) |
| Brand | KRI (Kaufman & Robinson, Inc.) |
|---|---|
| Origin | USA |
| Model | RFICP 220 |
| Anode RF Power | 2 kW @ 2 MHz |
| Max. Beam Current | >1000 mA |
| Beam Energy Range | 100–1200 eV |
| Operating Gases | Ar, O₂, N₂, and other process gases |
| Gas Flow Rate | 5–50 sccm |
| Chamber Pressure | <0.5 mTorr |
| Grid Diameter | 22 cm |
| Grid Material | Molybdenum |
| Beam Optics | OptiBeam™ self-aligning ion optics |
| Neutralizer | LFN 2000 or MHC 1000 |
| Dimensions (H × D) | 30 cm × 41 cm |
| Flange | 10" ConFlat (CF) |
| Brand | ph-instruments |
|---|---|
| Origin | Denmark |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Industrial Equipment |
| Model | TEMP 300 |
| Heating Power Options | 6–36 kW (6/9/12/18/24/36 kW) |
| Max Operating Temperature | 300°C (±1°C PID control) |
| Thermal Fluid | Synthetic high-temp heat transfer oil (YD-400 series) |
| Protection Rating | IP54 (control cabinet) / IP65 (heating chamber) |
| Circulation Pump | P3/P4 high-pressure pump, max flow 66 L/min, max pressure 3.4–4.4 bar |
| Cooling System | I2/I4 heat exchanger, cooling capacity 36–72 kW at ΔT = 250°C |
| Process Interface | 1/2" BSP (hot side), Cooling Interface: 3/8" BSP (coolant side) |
| Power Supply | 3-phase 400 V, 50 Hz (optional 480 V, 60 Hz) |
| Dimensions (L×W×H) | ≤12 kW: 855×330×890 mm |
| ≤36 kW | 855×495×985 mm |
| Net Weight | 98 kg (12 kW), 165 kg (36 kW) |
| Certifications | CE (EN 60204-1:2018 & EN 60519-1:2015), ISO 9001:2015, optional ATEX |
| Key Features | Multi-layer thermal insulation (<3% heat loss), micro-positive pressure operation (<5 bar), industrial-grade noise reduction (≤58 dB), automatic oil level compensation, vacuum-run protection, programmable cooling, rapid mold drain, external PT100 input, runtime meter, 20 mA serial interface, 4–20 mA analog output, Profibus-DP, Ethernet/IP, Profinet, DeviceNet |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | ACP 15, ACP 28, ACP 40 |
| Ultimate Pressure (with gas ballast) | ≤ 0.1 mbar |
| Pumping Speed | 14–37 m³/h |
| Max. Water Vapor Handling Capacity | 1000 g/h |
| Gas Ballast Flow Rate | > 2 Nm³/h (at 1 bar abs) |
| Leak Rate (He) | < 5 × 10⁻⁷ mbar·L/s |
| Weight | 23–32 kg |
| Certifications | CE, UL/CSA, SEMI S2 |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Ambrell EASYHEAT |
| Pricing | Available Upon Request |
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