Nanoindentation and Scratch Tester
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| Brand | Fischer |
|---|---|
| Origin | Germany |
| Model | HM2000_S |
| Compliance | DIN EN ISO 14577 |
| Measurement Principle | Instrumented Indentation Testing (IIT) |
| Output Parameters | Martens Hardness (HM), Indentation Hardness (HIT), Indentation Modulus (EIT), Indentation Creep (CIT), Elastic Work Ratio (ηIT = Welast/Wtotal) |
| Enhanced Stiffness Procedure (ESP) | Yes |
| Load Range | Sub-mN to 1 N (typical for micro/nano-scale IIT systems) |
| Depth Resolution | < 0.1 nm |
| Load Resolution | < 1 µN |
| Sample Height Max | ~100 mm |
| XY Stage Travel | 100 × 100 mm (motorized, optional) |
| Brand | Keysight |
|---|---|
| Origin | USA |
| Model | G200 / InSEM / iMicro / iNano |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Indenter Types | Dozens of interchangeable tips (Berkovich, Cube-corner, Spherical, Conical, etc.) |
| Compliance | ASTM E2546, ISO 14577, USP <1062>, GB/T 22458–2008, GB/T 25898–2010 |
| Measurement Principle | Continuous Stiffness Measurement (CSM), Dynamic Contact Depth Control, Load-Displacement Feedback Loop |
| Brand | Keysight |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | G200 |
| Price Range | USD 270,000 – 405,000 (based on configuration) |
| Instrument Type | Integrated Nanoindentation & Scratch Tester |
| Indenter Types | Over 30 standardized and custom tip geometries (Berkovich, cube-corner, spherical, conical, wedge, etc.) |
| Brand | Keysight |
|---|---|
| Origin | USA |
| Model Series | G200, T150, iNano, InSitu |
| Instrument Type | Nanoindentation and Scratch Tester |
| Maximum Load Capacity | 10 N |
| Load Resolution | <1 nN |
| Displacement Resolution | <0.02 nm |
| Indenter Types | Berkovich, Cube-Corner, Vickers, Spherical (radius down to 1 µm) |
| Standard Test Load | 500 mN |
| Core Technology | Continuous Stiffness Measurement (CSM), In-Situ Nanomechanical Testing, High-Resolution Scanning Probe Imaging |
| Compliance | ASTM E2546, ISO 14577, GB/T 22458 (Chinese National Standard incorporating K-T CSM patent) |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | Gemini |
| Price Range | USD $65,000 – $130,000 |
| Instrument Type | Multi-Axis Nanomechanical Testing System |
| Maximum Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range | 50 µm |
| Displacement Resolution | 4 nm |
| Maximum Friction Force | 50 mN |
| Indenter Tip Material | Single-Crystal Diamond |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iMicro |
| Maximum Load Capacity | 1 N |
| Force Resolution | 6 nN |
| Force Noise Floor | <200 nN |
| Indentation Depth Range | up to 80 µm |
| Depth Resolution | 0.04 nm |
| Depth Drift Rate | <0.05 nm/s |
| Time Constant | 20 µs |
| Scratch Option | up to 50 mN load, 2.5 mm lateral displacement, 500 µm/s max speed |
| Stage Travel (X/Y/Z) | 100 mm × 150 mm × 25 mm |
| Load Stiffness | >3,500,000 N/m |
| Tip Calibration | Integrated TiP-Calibration system |
| Software Platform | InView (scriptable experiment design), optional NanoBlitz 3D topography & tomography module |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iMicro |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Maximum Normal Load | 1 N |
| Load Resolution | <1 nN |
| Displacement Range | ±25 µm |
| Displacement Resolution | <0.05 nm |
| Indenter Types | Dozens of diamond indenters (Berkovich, cube corner, Vickers, spherical, flat punch, etc.) |
| Controller | InQuest high-speed controller (100 kHz data acquisition, 20 µs time constant) |
| Software | InView Suite (RunTest, ReviewData, InFocus, InView University, mobile app) |
| Compliance | Fully supports ISO 14577-1/2/3, ASTM E2546, and GLP/GMP-aligned audit trails |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | iNano |
| Instrument Type | Bio-Nanoindenter |
| Effective Load Range | 1 N |
| Load Resolution | < 10 nN |
| Displacement Range | 50 µm |
| Displacement Resolution | < 0.05 nm |
| Indenter Types | Dozens of interchangeable geometries (Berkovich, cube corner, Vickers, spherical, flat, etc.) |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iNano |
| Maximum Force | 50 mN |
| Force Resolution | 3 nN |
| Force Noise | <200 nN (RMS) |
| Time Constant | 20 µs |
| Maximum Indentation Depth | 50 µm |
| Displacement Noise | <0.1 nm |
| Digital Displacement Resolution | 0.02 nm |
| Drift Rate | <0.05 nm/s |
| Dynamic Frequency Range | 0.1 Hz – 1 kHz |
| Z-Stage Travel | 25 mm |
| X-Stage Travel | 100 mm |
| Y-Stage Travel | 150 mm |
| Load Frame Stiffness | >1,000,000 N/m |
| Scratch Max Normal Load | 50 mN |
| Scratch Max Distance | 2.5 mm |
| Scratch Max Speed | 500 µm/s |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iNano |
| Load Resolution | <100 nN |
| Displacement Resolution | <0.01 nm |
| Maximum Load Capacity | 500 mN |
| Thermal Drift | <0.05 nm/s (typical) |
| Compliance | ASTM E2546, ISO 14577, ISO 20513, USP <1062>, FDA 21 CFR Part 11 compliant software options available |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Instrument Type | Nanoindentation and Scratch Tester |
| Model | iNano® |
| Force Range | 0.1 µN – 50 mN |
| Displacement Range | ±25 µm |
| Force Resolution | < 10 nN |
| Displacement Resolution | < 0.01 nm |
| Thermal Drift | < 0.05 nm/s (at 25 °C, stabilized) |
| Maximum Scratch Load | 50 mN |
| Available Indenter Types | Berkovich, Cube-Corner, Spherical (1–100 µm radius), Conical, Flat Punch |
| Integrated Microscope | 10×–100× digital zoom, 1 µm lateral resolution |
| Controller | InQuest™ high-speed electronics (100 kHz sampling, 20 µs time constant) |
| XY Stage Travel | 100 mm × 100 mm |
| Z-Stage Travel | 25 mm |
| Compliance with Standards | ASTM E2546, ISO 14577-1/2/3, JIS H 8509 |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | InSEM HT |
| Instrument Type | High-Temperature In-Situ Nanoindentation and Mechanical Testing System for SEM/FIB Integration |
| Maximum Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range (X/Y) | 20 mm, (Z): 25 mm |
| Displacement Resolution | 4 nm |
| Maximum Friction Force | 0.05 N |
| Indenter Type | Diamond Berkovich / Cube-Corner / Spherical |
| Thermal Drift | < 0.05 nm at 800 °C |
| Operating Temperature Range | RT to 800 °C under vacuum |
| Compatibility | Integrated with SEM, FIB, or standalone high-vacuum chamber |
| Standards Compliance | ISO 14577-1/2/3, ASTM E2546, applicable to GLP/GMP-relevant mechanical property validation workflows |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | InSEM HT |
| Instrument Type | Nanoindentation System |
| Temperature Range | Up to 800 °C |
| Actuator Options | InForce 50 (50 mN) and InForce 1000 (1000 mN) |
| Data Acquisition Rate | 100 kHz |
| Time Constant | 20 µs |
| XYZ Stage Travel | 20 mm × 20 mm × 25 mm |
| Software Platform | InView (Windows® 10 compatible) with User Method Development, CSM, NanoBlitz 3D, AccuFilm™, ProbeDMA™, DataBurst™ |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Nano Indenter G200 |
| Force Range | 10 nN – 10 N (with modular transducers) |
| Displacement Resolution | < 0.01 nm |
| Maximum Indentation Depth | > 500 µm |
| Testing Speed | Up to 1 indentation point per second |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | G200 |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Maximum Load Capacity | 10 N |
| Displacement Resolution | < 0.01 nm (10 pm) |
| Load Resolution | < 50 nN |
| Compatible Modules | DCM II, XP Actuator, CSM, ProbeDMA™, AccuFilm™, Laser Heating, LFM, NanoVision, Survey Scanning, Express Test |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | G200X |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Maximum Load Capacity | 10 N |
| Load Resolution | <1 nN |
| Displacement Range | ±50 µm |
| Displacement Resolution | <0.01 nm |
| Indenter Types | Over 30 interchangeable tip geometries (Berkovich, cube-corner, spherical, flat-punch, etc.) |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | NanoFlip |
| Price Range | USD 260,000–390,000 (est.) |
| Instrument Type | In-Situ Nanomechanical Testing System |
| Max Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range (X/Y) | 20 mm, (Z): 25 mm |
| Displacement Resolution | 4 nm |
| Max Friction Force | 0.05 N |
| Indenter Tip | Diamond Berkovich or Cube-Corner |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | NanoFlip |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Environmental Operation | Vacuum and Controlled Atmosphere (including Glovebox-Compatible) |
| Actuator | InForce 50 Electromagnetic Force Actuator with Capacitive Displacement Sensing |
| Controller | InQuest High-Speed Digital Controller (100 kHz Data Acquisition, 20 µs Time Constant) |
| Motion System | Motorized XYZ Stage (X/Y: 21 mm Travel, Z: 25 mm Travel) |
| Sample Orientation | Flip Mechanism for SEM/FIB Imaging Alignment |
| FIB-to-Test Capability | 90° Sample Tilt for Seamless Transition from FIB Milling to Nanomechanical Testing |
| Software | InView™ v6.x (Windows® 10 Compatible), Includes ISO 14577 Compliance Module, User Method Development Toolkit, Real-Time SEM Video Synchronization, Integrated Tip Calibration Suite |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | UTM T150 |
| Instrument Type | Nanoindentation and Scratch Tester |
| Application Category | Surface & Interface Property Testing |
| Compliance | ASTM-compliant |
| Brand | Micro Materials |
|---|---|
| Origin | United Kingdom |
| Model | NanoTest Vantage |
| Instrument Type | Integrated Nanoindentation & Scratch Tester |
| Maximum Indentation Depth | >10 mm |
| Effective Load Range | 500 mN |
| Load Resolution | 3 nN |
| Displacement Range (XY) | 100 µm × 100 µm |
| Displacement Resolution | 0.002 nm |
| Maximum Friction Force | >250 mN |
| Indenter Types | Diamond, Cubic Boron Nitride (c-BN), Sapphire |
| Thermal Drift | <0.005 nm/s |
| Brand | Micro Materials |
|---|---|
| Origin | United Kingdom |
| Model | Xtreme |
| Instrument Type | Nanoindentation and Scratch Tester |
| Displacement Resolution | 0.002 nm |
| Indenter Types | Diamond, Boron Nitride, Sapphire |
| Thermal Drift | < 0.005 nm/s |
| Vacuum Level | 10⁻⁷ mbar |
| Temperature Range (Vacuum) | −40 °C to 1000 °C |
| Load Frame | Electromagnetic Actuation |
| Load Resolution | 3 nN |
| Repeatability Accuracy | < 0.4 µm |
| Compliance | ISO 14577, ASTM E2546 |
| Brand | Oxford Instruments |
|---|---|
| Origin | Switzerland |
| Model | FT-I04 |
| Instrument Type | Nanoindenter |
| Maximum Load Range | 2 N (across 5 selectable load channels) |
| Load Resolution | 0.5 nN (FT-S200 sensor) |
| Displacement Resolution | 0.05 pm |
| Indenter Tip Materials | Diamond, Tungsten Carbide, Sapphire |
| Indenter Geometries | Berkovich, Cube Corner, Flat Punch, Wedge, Conical, Spherical |
| Brand | Oxford Instruments |
|---|---|
| Origin | Switzerland |
| Model | FT-NMT04 |
| Load Range | 5 selectable full-scale channels, up to 2 N (FT-S2’000’000) |
| Load Resolution | 0.5 nN (FT-S200) |
| Displacement Range | 0.05 nm – 21 mm |
| Displacement Resolution | 0.05 pm |
| Brand | Rtec |
|---|---|
| Origin | Switzerland |
| Model | MFT-5000-HD |
| Instrument Type | Integrated Nanoindentation and Scratch Tester |
| Maximum Test Temperature | 1200 °C |
| Environmental Control | Inert Gas (Ar/N₂) or Vacuum (down to 10⁻⁷ mbar) |
| Load Range | 0.25–2000 N |
| Load Resolution | < 0.1% of full scale |
| Temperature Uniformity | ±2 °C across sample zone |
| Sample Stage | Motorized XY with programmable multi-point mapping |
| Compliance | ASTM E18, ISO 6508, ISO 14577, ASTM G171 (scratch), ASTM C1327 (ceramics) |
| Operating System | Windows 10 Professional |
| Power Supply | 110/220 V AC, 50/60 Hz |
| Environmental Chamber | Sealed, water-cooled, dual-zone heated |
| Brand | Rtec |
|---|---|
| Origin | Switzerland |
| Model | SMT-2000 |
| Instrument Type | Nanoindentation and Scratch Tester |
| Compliance Standards | ASTM E2546, ASTM B933, ASTM D785, ASTM E140, ISO 14577, ISO 6508, ISO 6507, ISO 4516, DIN 50359, DIN 55676, JIS B7734 |
| Actuation | Piezoelectric ceramic drive |
| Sensing Technology | Capacitive displacement sensing |
| Load Range | Nanonewton to 10 N (full-scale) |
| Vertical Resolution | Sub-nanometer |
| Lateral Sample Dimensions | Up to 500 mm × 500 mm |
| Maximum Sample Weight | 10 kg |
| Tip Options | Berkovich, Vickers, spherical, cube-corner, Knoop |
| In-situ 3D topography mapping | Yes |
| Active vibration isolation | Integrated platform |
| Brand | Rtec |
|---|---|
| Origin | Switzerland |
| Model | SMT-5000 |
| Instrument Type | Nanoindentation and Scratch Tester |
| Maximum Indentation Depth | 500 µm |
| Effective Load Range | 0.1–200 N |
| Load Resolution | 0.1 N |
| Displacement Range | 100 mm |
| Displacement Resolution | 1 nm |
| Maximum Friction Force | 100 N |
| Indenter Type | Diamond |