Other Semiconductor Industry Instruments
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| Brand | Oxford Instruments |
|---|---|
| Origin | United Kingdom |
| Model | Ionfab 300 |
| Configuration Options | Direct-Load, Single-Wafer Transfer, Cassette-to-Cassette Transfer |
| Process Modes | Ion Beam Deposition (IBD), Ion Beam Etching (IBE), Co-deposition & Reactive IBE |
| Wafer Handling | 300 mm single-wafer or cluster-integrated |
| Surface Roughness | Sub-nanometer RMS (typical for IBD films) |
| Uniformity | ≤±1.5% across 300 mm wafer (process-dependent) |
| Reproducibility | CV < 2% for etch/deposition rate (run-to-run) |
| Brand | Oxford Instruments |
|---|---|
| Origin | United Kingdom |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | PlasmaPro 100 ALE |
| Pricing | Available Upon Request |
| Brand | Oxford Instruments |
|---|---|
| Origin | United Kingdom |
| Model | PlasmaPro 100 Estrelas |
| Substrate Size | 50–200 mm |
| Application Scope | Deep Silicon Etching (DSiE), MEMS, Advanced Packaging, Nanotechnology |
| Chamber Configuration | Single-chamber dual-mode (Bosch™ and cryogenic etching) |
| Process Flexibility | In-situ switchable between smooth sidewall, high-aspect-ratio, tapered via, and high-rate cavity etching |
| Key Hardware | Electrostatic/Heated chuck, optimized chamber liner, high-efficiency turbomolecular pump, fast-response mass flow controllers (MFCs), close-coupled RF delivery |
| Brand | Oxford Instruments |
|---|---|
| Origin | United Kingdom |
| Model | PlasmaPro 100 Polaris |
| Wafer Size | 100 mm (4-inch) |
| Plasma Source | Inductively Coupled Plasma (ICP) with Magnetic Confinement |
| Electrode Configuration | Actively Cooled Bottom Electrode |
| Chuck Type | Electrostatic Chuck (ESC) with DC Bias Control |
| Chamber Liner | Heated, Anodized Aluminum |
| Pumping System | High-Capacity Turbomolecular Pump with Cryo-Assisted Roughing |
| Process Gas Compatibility | Cl₂, BCl₃, SF₆, CHF₃, O₂, Ar, N₂, and custom gas mixtures |
| Control Architecture | PLC-based real-time process control with Ethernet-enabled SECS/GEM interface |
| Compliance | CE-marked |
| Brand | Oxford Instruments |
|---|---|
| Origin | United Kingdom |
| Model | NGP80 |
| Configuration Options | RIE, PECVD, RIE/PECVD |
| Wafer Handling | Up to 200 mm diameter wafers |
| Footprint | Compact (Small-Footprint) Design |
| Safety Compliance | SEMI S2/S8 |
| Control Architecture | Next-Generation Bus-Based Control System |
| User Interface | Enhanced Front-End Software with Integrated Diagnostics and Auto-Cleaning Protocol |
| Process Capabilities | Thin-film deposition (e.g., SiNₓ, SiO₂, a-Si:H), reactive ion etching, in-situ chamber conditioning |
| Brand | MicroChem Corp |
|---|---|
| Origin | USA |
| Product Type | Photoimageable epoxy-based wafer bonding adhesive |
| Series | PermiNex™ 1000 and 2000 |
| Temperature Resistance | <200 °C cure |
| Resolution | High-resolution patterning |
| Aspect Ratio | Up to 3:1 |
| Developer Compatibility | Aqueous alkaline solutions |
| Substrate Adhesion | Silicon, glass, quartz, SiO₂, SiNₓ |
| Shelf Life Storage | 4–21 °C |
| Corrosivity | Low metal ion contamination |
| Conformality | Void-free, conformal interface |
| Edge Acuity | Sharp, crack-free pattern edges |
| Reliability | Qualified for HAST (JESD22-A110) and TCT (JESD22-A104) |
| Seal Integrity | High hermeticity post-bond |
| Process Compatibility | Compatible with dicing, laser welding, and backend packaging steps |
| Brand | Binzhenghong |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Producer |
| Country of Origin | China |
| Capacity Options | 60 mL, 90 mL, 120 mL, 150 mL, 180 mL |
| Pricing | Upon Request |
| Brand | Binzhenghong |
|---|---|
| Model | 1/4″ PFA Three-Way Valve |
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Pricing | Upon Request |
| Brand | Binzhenghong |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Producer |
| Classification | Domestic |
| Capacity Range | 10 mL to 1000 mL |
| Pricing | Upon Request |
| Brand | Binzhenghong |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Producer |
| Origin Category | Domestic |
| Grade | Class A |
| Pricing | Available Upon Request |
| Brand | Pfeiffer Vacuum |
|---|---|
| Model | ADPC 302 |
| Origin | France |
| Type | In-line Dry Particle Counter for Semiconductor Front-Opening Unified Pod (FOUP) and Front-Opening Shipping Box (FOSB) |
| Measurement Range | 0.1 µm – 5.0 µm |
| Counting Principle | Laser Light Scattering (LLS) with Automated Surface Scanning |
| Cycle Time | ≤7 min per FOUP/FOSB |
| Throughput | Up to 8 carriers/hour |
| Compliance | SEMI S2/S8, ISO 14644-1 Class 1–ISO Class 3 environments |
| Interface | Ethernet/IP, SECS/GEM compatible |
| Operating Mode | Fully Automated, Unattended, Integrated into 300 mm Fab Automation |
| Brand | Pri-eco |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | QCL2 500 |
| Pricing | Available Upon Request |
| Current Noise Density | ≤928 nA<sub>p-p</sub> (0.1–10 Hz) |
| RMS Noise | 36.7 nA/√Hz (1 Hz–100 kHz) |
| Output Current Range | 0–500 mA |
| Short-Term Stability | 310 ppm (after 1 h warm-up) |
| Long-Term Stability | 820 ppm (24 h after 1 h warm-up) |
| Temperature Coefficient | 6–15 ppm/°C |
| Output Voltage Compliance | ±24 VDC |
| Rise/Fall Time | 3.6 µs / 2.6 µs (RL = 36 Ω, 10%–90%) |
| Slew Rate | 160 A/ms |
| Leakage Current | ≤500 µA |
| Supply Voltage | ±18 to ±25 VDC |
| Dimensions | 78 × 108 × 40 mm |
| Weight | 0.13 kg |
| Brand | PULUODY |
|---|---|
| Model | PMT-2 |
| Detection Principle | Dual-Laser Narrow-Beam Light Scattering |
| Measurement Range | 0.03–3000 µm (configurable sensor modules) |
| Calibration Standards | ISO 21501-4, USP <788>, EP 2.9.19, ChP 2015/2020, GB 8368 |
| Flow Control | Precision Piston Pump + Electromagnetic Flow Regulation |
| Accuracy | ±3% typical |
| Counting Resolution | Customizable channels (e.g., 1–100 µm, 4–70 µm(c), 0.1 µm(c)) |
| Coincidence Limit | ≤2.5% error at 1000 particles/mL |
| Sampling Precision | <±1% |
| Output | 4–20 mA analog signal |
| Alarm | Configurable particle concentration threshold alert |
| Data Interface | iPad-compatible wireless acquisition |
| Software | PULUODY V8.3 Integrated Analysis & Calibration Suite (PC & touchscreen) |
| Compliance | Supports 21 CFR Part 11 audit trail (optional configuration), GLP/GMP traceability mode |
| Power Input | 100–265 VAC, 50–60 Hz |
| Application Mode | Online continuous monitoring & offline portable/fixed sampling |
| Brand | PULUODY |
|---|---|
| Model | PMT-2-C |
| Detection Principle | Dual-Laser Narrow-Beam Light Scattering |
| Sensor Generation | 8th-Generation Dual-Laser Optical Sensor |
| Measuring Range | 0.05–0.2 µm, 0.1–0.5 µm (standard) |
| Sampling Method | Precision Metering Piston Pump + Electromagnetic Flow Control |
| Sampling Accuracy | < ±1% |
| Counting Accuracy | < ±3% (typical) |
| Coincidence Limit | 1000 particles/mL (2.5% coincidence error) |
| Output Interface | 4–20 mA analog output |
| Alarm Function | Configurable particle concentration threshold alert |
| Data Reporting | Particles per mL & ISO 4406 / NAS 1638 contamination code |
| Compliance Standards | JJG 1061, ISO 21501-4, USP <788>, EP 2.9.19 |
| Software Platform | V8.3 Integrated Analysis & Calibration Software (PC + touchscreen UI) |
| Power Input | 100–265 VAC, 50–60 Hz |
| Display | Color LCD touchscreen + optional wireless keyboard/mouse |
| Brand | PULUODY |
|---|---|
| Model | PMT-2801 |
| Detection Principle | Dual-laser light scattering (narrow-beam, 8th-generation) |
| Particle Size Range | 0.1–0.5 µm (standard) |
| Accuracy | ±3% typical |
| Sampling Precision | <±1% |
| Coincidence Limit | ≤2.5% at 1000 particles/mL |
| Flow Control | Precision piston pump + electromagnetic flow regulation |
| Compliance | USP <788>, EP 2.9.19, BP, ChP 2015/2020, GB 8368, ISO 21501-4, JJG 1061 |
| Data Output | 4–20 mA analog interface |
| Power Input | 100–265 VAC, 50–60 Hz |
| Software | PULUODY V8.3 Integrated Analysis & Calibration Suite (PC + touchscreen GUI) |
| Operating Interface | Color LCD touch screen + optional wireless keyboard/mouse |
| Brand | PULUODY |
|---|---|
| Origin | Sichuan, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PMT-2DN |
| Price | USD 75,000 (FOB) |
| Detection Principle | Dual-Laser Narrow-Beam Light Scattering |
| Sensor Generation | 8th-Generation Dual-Laser Optical Sensor |
| Flow Control | Precision Plunger Pump + Electromagnetic Flow Regulation |
| Calibration Standards | JJG 1061, ISO 21501-4, Polystyrene Latex (PSL) Reference Standards |
| Detection Range | 0.1–0.5 µm (standard) |
| Customizable | 1–100 µm or 4–70 µm (c) |
| Minimum Detectable Size | 0.1 µm (c) |
| Sampling Accuracy | < ±1% |
| Measurement Accuracy | < ±3% (typical) |
| Coincidence Limit | ≤2.5% at 1000 particles/mL |
| Output Interface | 4–20 mA analog output |
| Alarm Function | Configurable particle concentration threshold alert |
| Data Reporting | Particles per mL + ISO 4406 / NAS 1638 contamination code |
| Power Input | 100–265 VAC, 50–60 Hz |
| Display & Control | Color LCD touchscreen + optional wireless keyboard/mouse |
| Software | PULUODY V8.3 Analysis & Calibration Suite (PC & embedded) |
| Brand | PULUODY |
|---|---|
| Model | PMT-2LS |
| Detection Principle | Dual-Laser Narrow-Beam Light Scattering |
| Sensor Generation | 8th-Generation Dual-Laser Optical Sensor |
| Detection Range | 0.1–0.5 µm (standard) |
| Sampling Method | Precision Metering Piston Pump |
| Flow Control | Dual-Stage Electromagnetic + Precision Piston Pump |
| Accuracy | ±3% typical |
| Volume Accuracy | ±1% |
| Coincidence Limit | ≤2.5% error at 1000 particles/mL |
| Output | 4–20 mA analog interface with programmable contamination alarm |
| Reporting | Particles per mL & ISO 4406 / NAS 1638 / SAE AS4059 contamination codes |
| Calibration Standards | JJG 1061, ISO 21501-4, NIST-traceable latex spheres |
| Software | V8.3 Integrated Analysis & Calibration Software (PC + embedded touchscreen UI) |
| Display | Color LCD touch interface + optional wireless keyboard/mouse |
| Power Input | 100–265 VAC, 50–60 Hz |
| Compliance | Designed for ISO Class 1–5 cleanroom environments |
| Brand | PULUODY |
|---|---|
| Origin | Shaanxi, China |
| Manufacturer Type | Manufacturer |
| Country of Origin | China |
| Model | PS8011+ |
| Price Range | USD 135 – 525 |
| Material Options | PP, PE, PFA, PEEK, PFAD, High-Silica Borosilicate Glass |
| Volume Options | 50 mL to 1000 mL |
| Particle Cleanliness Level | RCL < 15 particles per 100 mL |
| Certified Cleanliness Classes | ISO Class 1–9 (per ISO 14644-1) |
| Particle Detection Thresholds | 0.1 µm, 0.3 µm, 0.5 µm, 1.0 µm, 2.0 µm, 5.0 µm |
| Average Outgoing Quality Limit (AOQL) | 0.5% |
| Compliance Standards | ISO 3722, ISO 14644-1, GB/T 17484, GB 50073-2001, JIS B9925:1997, JIS K0554:1995 |
| Brand | 1124123/13213112 |
|---|---|
| Origin | Netherlands |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Quant Nuova |
| Pricing | Upon Request |
| Brand | Rayscience |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | WCT-120 |
| Measurement Principle | QSSPC (Quasi-Steady-State Photoconductance) |
| Lifetime Range | 100 ns – 10 ms |
| Test Modes | QSSPC, Transient, Lifetime Normalization Analysis |
| Resistivity Range | 3–600 Ω/sq. (undoped) |
| Carrier Injection Range | 1×10¹³ – 1×10¹⁶ cm⁻³ |
| Sensor Diameter | 40 mm |
| Sample Diameter | 40–210 mm (customizable down to smaller sizes) |
| Silicon Thickness | 10–2000 µm |
| Ambient Temperature | 20–25 °C |
| Power Consumption | Tester: 40 W |
| Controller PC | 200 W |
| Light Source | 60 W |
| Input Voltage | 100–240 VAC, 50/60 Hz |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Models | D-180, D-125 |
| Pricing | Available Upon Request |
| Brand | Rikori |
|---|---|
| Model | LQ-5Z-TMAH |
| Origin | Japan |
| Application | Single-component aqueous alkaline/acidic solution concentration measurement (TMAH, NaOH, Na₂CO₃, NH₃·H₂O, H₂SO₄, HNO₃, HCl) |
| Measurement Principle | Conductivity-based electrochemical sensing with temperature-compensated calibration |
| Range (TMAH) | 0.00–5.00 % w/w or 0.0–50.0 g/L |
| Temperature Range | 0.00–40.00 °C |
| Sensor Type | Chemically resistant 4C-type electrode (1 m cable) |
| Enclosure Rating | IP66 |
| Power | 3× LR03 alkaline batteries (auto-shutdown enabled) |
| Dimensions (main unit) | 38 × 75 × 180 mm (H×W×D) |
| Weight | ~300 g (unit), ~50 g (electrode) |
| Brand | Royce |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | AP+ |
| Pricing | Available Upon Request |
| Chip Size Range (Tray) | 0.2 mm² – >25 mm² |
| Chip Size Range (Tape) | 0.5 mm² – ≤17 mm² |
| Input Formats | Tape & Reel Carriers, Waffle Packs, Gel-Paks (2"–4"), JEDEC Trays, Wafer Frames (up to Ø300 mm), Dicing Tape Rings |
| Output Formats | Carrier Tapes (8–24 mm width, heat-seal or pressure-seal), Waffle Packs, Gel-Paks (2"–4"), JEDEC Trays, Tape Frames, Dicing Tape Rings, Custom Fixtures |
| Placement Accuracy | ±12.5 µm (repeatability) |
| Pick Mechanism | Top-surface or edge-vacuum pickup using interchangeable tooling (Rubber, Vespel®, Tungsten Carbide, Elastomer) |
| Cycle Time | As low as 1.3 seconds per die (application-dependent) |
| Brand | Scientech |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Domestic Product Classification | Yes |
| Model | 12-inch |
| Pricing | Available Upon Request |
| Brand | Semetrol |
|---|---|
| Origin | USA |
| Model | Semetrol DLTS |
| Temperature Range | 25 K – 700 K |
| Cooling | Closed-Cycle Liquid Helium Refrigerator |
| Capacitance Measurement Frequency | 1 MHz |
| Capacitance Sensitivity | 1 fF |
| Voltage Range | ±100 V (Boonton), ±10 V (DAQ) |
| Voltage Resolution | 0.3 mV (DAQ, <20 V), 1 mV (<20 V), 10 mV (>20 V) |
| Pulse Width Range | 5 μs – >0.1 s (DAQ), 15 ms – >0.1 s (Boonton) |
| Pulse Amplitude | up to 200 V (Boonton), up to 20 V (DAQ) |
| Slew Rate | <20 V/ms (Boonton), 20 V/μs (DAQ) |
| Current Limit | 5 mA |
| Sampling Rate | down to 1 μs |
| Record Length | >10,000 points |
| Time Resolution | 50 ns |
| Capacitance Resolution | <50 aF |
| Automatic Zeroing | Yes |
| Auto-Ranging | Yes |
| Response Time | ~25 μs |
| Compensation Range | 256 pF |
| Test Signal Levels | 15, 30, 50, 100 mV |
| Filtering | Auto-detection and sinusoidal noise suppression |
| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Model | MDPinline |
| Application | In-line quantitative minority carrier lifetime mapping of silicon wafers |
| Measurement Principle | Microwave-detected photoconductance decay (µ-PCD) |
| Scan Speed | <1 second per wafer |
| Integration | Conveyor-compatible, no moving mechanical parts |
| Compliance | Designed for semiconductor manufacturing environments compliant with ISO 9001 and SEMI S2/S8 safety standards |
| Software Interface | Ethernet-enabled, supports SECS/GEM protocol for factory automation integration |
| Data Output | Full-wafer lifetime map (pixel-resolved), dual-line resistivity profile, CSV/HDF5 export |
| Calibration | Traceable to NIST-traceable reference wafers |
| Operating Environment | Class 1000 cleanroom compatible (ISO 4), 18–28 °C, <60% RH non-condensing |
| Power Supply | 100–240 V AC, 50/60 Hz, <500 W |
| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Model | MDPspot |
| Type | Contactless, Microwave Photoconductance Decay (μ-PCD) Based Lifetime Tester |
| Sample Handling | Manual Z-axis adjustment (up to 156 mm height) |
| Measurement Mode | Single-point, non-contact, room-temperature operation |
| Material Compatibility | Crystalline and multicrystalline silicon wafers & bricks |
| Compliance | Designed for R&D and process monitoring in PV and semiconductor fabrication environments |
| Software | MDP Control Suite (Windows-based, real-time visualization, CSV export, GLP-compliant data logging) |
| Brand | Sinton Instruments |
|---|---|
| Origin | USA |
| Model | WCT-120 |
| Minority Carrier Lifetime Range | 0.1 µs – 15 ms |
| Penetration Depth | 3 mm |
| Sample Diameter | up to 210 mm |
| Resistivity Measurement Range | 0.15 – 300 Ω·cm |
| Test Material | Silicon Wafers |
| Brand | Sinton Instruments |
|---|---|
| Origin | USA |
| Model | WCT-120MX + Suns-VocMX |
| Minority Carrier Lifetime Range | 0.1 µs – 15 ms |
| Penetration Depth | 3 mm |
| Sample Diameter | Up to 230 mm |
| Resistivity Range | 0.15 – 300 Ω·cm |
| Material Compatibility | Silicon wafers |