Process Mass Spectrometry Online Mass Spectrometry
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| Brand | Altamira Instruments (USA) |
|---|---|
| Origin | USA |
| Model | AMI-Master 400 Quadrupole Mass Spectrometer |
| Configuration | Benchtop Process Mass Spectrometry System |
| Ion Source | Electron Impact (EI), 70 eV standard |
| Mass Range | 1–300 amu |
| Detection Modes | Faraday Cup & Electron Multiplier (dual-mode) |
| Scan Speed | <10 ms per decade |
| Response Time | <100 ms (full-spectrum acquisition) |
| Operating Pressure (Ion Source) | 1×10⁻⁶ to 5×10⁻⁵ Torr |
| Vacuum System | Turbo-molecular pump (200 L/s) + Oil-free diaphragm backing pump |
| Inlet Temperature Control | Ambient to 200 °C (capillary + filter assembly, independently regulated) |
| Chamber Bake-out Capability | Up to 200 °C |
| Software Platform | Windows 7/10-compatible multi-channel gas analysis suite with real-time quantitation, spectral library matching, and audit-trail-enabled data logging |
| Brand | Altamira Instruments (USA) |
|---|---|
| Origin | USA |
| Model | AMI-Master400 |
| Vacuum System | Turbo-molecular pump + oil-free diaphragm dry pump with full-range vacuum gauge |
| Inlet System | Heated stainless-steel or quartz capillary (ambient–200 °C), dual-stage pressure reduction |
| Mass Analyzer | Quadrupole mass filter with electron impact (EI) ion source |
| Detectors | Dual-mode detection — Faraday cup and electron multiplier |
| Detection Range | 100% to sub-ppb (v/v) |
| Response Time | <100 ms |
| Scan Speed | Millisecond-scale mass scanning |
| Mass Range | 1–300 u (standard), upgradable to 500 u |
| Operating Software | Multi-channel gas analysis suite for Windows 7/10, compliant with GLP/GMP data integrity requirements |
| Bake-out Capability | Mass spectrometer chamber heatable to 200 °C for in-situ outgassing |
| Compliance | Designed to support ASTM D7622, ISO 10156, USP <1251>, and FDA 21 CFR Part 11 audit-trail functionality |
| Brand | Anyeep |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | RGA 6500 |
| Pricing | Upon Request |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | AST3007 |
| Mass Range | 2–285 amu |
| Resolution | 0.8 ± 0.2 (FWHM) |
| Detection Limit | 0.1 ppm |
| Sampling Speed | High-speed dynamic acquisition |
| Sensitivity | Sub-ppb for key process gases |
| Vacuum System | Turbomolecular pump |
| Detector | Faraday Cup / Secondary Electron Multiplier (FC/SEM) |
| Operating Temperature | 15–35 °C |
| Power Consumption | 350 W |
| Dimensions (L×W×H) | 299 × 218 × 331 mm |
| Weight | 15 kg |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Aston™ Process Mass Spectrometer |
| Pricing | Available Upon Request |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | Aston™ |
| Application Domain | In-line Process Mass Spectrometry for Semiconductor Vacuum System Integrity Monitoring |
| Compliance Context | Designed for ISO 9001-certified semiconductor fabs |
| Environmental Rating | IP65-rated enclosure |
| Brand | Beishide Instrument |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Model | BSD-MASS |
| Quadrupole Mass Analyzer | INFICON (USA-manufactured, with Certificate of Origin & Factory Calibration Report) |
| Mass Range | Standard 1–100 amu |
| Filament | Dual Iridium-coated filaments (active/standby, software-switchable) |
| Resolution | <0.5 ppm at 40 amu |
| Scan Speed | Up to 1.8 ms/amu, step size 0.1 amu |
| Minimum Detectable Partial Pressure | 2 × 10⁻¹⁵ Torr (4 s dwell time) |
| Sample Flow Rate | Standard down to 2 SCCM |
| Response Time | <1 s at ≤2 SCCM flow |
| Precision Splitting System | Integrated high-accuracy flow splitter |
| Soft Ionization | Electron energy digitally adjustable (0–100 eV) |
| Turbo Molecular Pump | Edwards, 85 L/s, 100,000 RPM, base pressure 1 × 10⁻¹² mbar |
| Dry Scroll Pump | 20 L/s, base pressure 1 × 10⁻¹ mbar |
| Vacuum Chamber | Monolithic, weld-free heated chamber (bakeable to 150 °C) |
| Inlet Interface | 1.2 m passivated stainless steel capillary (anti-condensation & anti-clogging design) |
| Software | INFICON OEM platform (English), TCP/IP communication |
| Dimensions | 510 mm (H) × 520 mm (L) × 225 mm (W), Weight: 30 kg |
| Brand | Dongxi Analytical |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | PTR-QMS3500 |
| Pricing | Upon Request |
| Mass Range | 1.5–600 amu |
| Resolution | Unit Mass Resolution |
| Response Time | 100 ms |
| Detection Limit | 100 pptv (for benzene) |
| Linear Dynamic Range | 50 pptv – 10 ppmv |
| Adjustable Inlet Flow Rate | 80–800 sccm |
| Heated Capillary Inlet Length | 1.0 m (inert, temperature-controlled up to 150 °C) |
| Drift Tube/Reaction Chamber Temperature Range | 40–150 °C |
| Primary Reagent Ion | H₃O⁺ |
| Optional Reagent Ions | NH₄⁺, O₂⁺, NO⁺ |
| Power Supply | 220 V AC |
| Dimensions (W × H × D) | 48 × 54.5 × 63 cm |
| Weight | ~100 kg |
| Remote Interface | 4–20 mA output & MODBUS RTU protocol support |
| Brand | EWIN-TECH |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Regional Classification | Domestic (China) |
| Model | AION 1000 |
| Pricing | Upon Request |
| Brand | FPI |
|---|---|
| Origin | Zhejiang, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | LGA Series |
| Pricing | Available Upon Request |
| Brand | FPI |
|---|---|
| Origin | Zhejiang, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | Mars-550 |
| Pricing | Available Upon Request |
| Brand | HEL (UK) |
|---|---|
| Origin | United Kingdom |
| Model | BTC-MS |
| Principle | Direct in situ coupling of HEL’s BTC-series adiabatic calorimeters (BTC-130, BTC-500, Phi-TEC II, etc.) to high-pressure mass spectrometer via factory-integrated vacuum-tight, heated transfer line and pressure-matched sampling interface |
| Response Time | 3000 s |
| Maximum Inlet Pressure | 15 bar (1.5 MPa |
| Sampling Interface Material | Stainless steel / PEEK / borosilicate glass with integrated high-temp particulate filter |
| Operating Temperature Range (Interface) | >500 °C (stainless steel) |
| Mass Range | 1–200 amu |
| Detector | Dual-mode C-SEM/Faraday |
| LOD (C-SEM) | <1 ppm |
| LOD (Faraday) | <20–100 ppm (dependent on ion species) |
| Resolution | 0.5–2.5 amu |
| Sample Chamber Dimensions (BTC-130) | Ø ≥130 mm × H ≥200 mm |
| BTC-500 Chamber | Ø 500 mm × H 500 mm, max operating temp 450 °C, low-temp capability down to −15 °C |
| Compliance | Designed for GLP/GMP-aligned thermal safety testing per ASTM E1981, ISO/IEC 17025, and UN GHS Test Series 3 & 4 |
| Brand | HEXIN MASS SPECTROMETRY |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SPIMS 2000 |
| Pricing | Upon Request |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | 3F 1000/2000 Series |
| Mass Range | 1–300 amu (standard), up to 2500 amu (optional) |
| Detection Speed | 500 points/s |
| Resolution | 0.1% valley, 1% valley |
| Dynamic Range | 10⁷ |
| Minimum Detectable Partial Pressure | 2 × 10⁻¹⁴ mbar |
| Electron Energy Control | 0–150 eV (fully programmable) |
| Stability | < ±0.5% peak height drift over 24 h |
| Quadrupole Rod Diameters | 6 mm, 9 mm, or 12 mm (user-selectable) |
| Detector Options | SEM, PIC, dual Faraday/SEM, or Faraday/PIC |
| Interface | RS232, USB, Ethernet |
| Software | MASsoft Professional |
| Origin | UK |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | HPR20 QICPlus |
| Quotation | Upon Request |
| Mass Range | 1–50 / 1–200 / 1–300 / 1–500 / 1–1000 amu |
| Quadrupole Type | Residual Gas Analyzer (RGA) or Triple-Filter (3F) Configuration |
| Capillary Inlet | Integrated quartz capillary (2 m length), stainless-steel sheathed, heated to 200 °C |
| Gas Flow Rate | 1–20 sccm (adjustable) |
| Inlet Pressure Range | 100 mbar–2 bar (standard) |
| Mounting Options | Benchtop or vehicle-mounted (optional) |
| Detection Limit | 0.1–1 ppm (RGA HAL series, standard) |
| Mass Resolution Step | 0.01 amu (minimum scan increment) |
| Multi-Channel Inlet Valve | Up to 80 channels (heated or unheated, optional) |
| Calibration Gas Panel | Four-component gas delivery and pre-mixing manifold |
| Sample/Calibration Switching | Dual-gas-path inlet with low-dead-volume valves, auto/manual toggle between zero gas, calibration gas, and process sample |
| Inlet Filter | 5 µm sintered metal, high transmission, low dead volume, field-serviceable |
| Quantification Software | Automated calibration using certified reference gases |
| output units | %, ppm, ppb |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | EPIC |
| Mass Range | 1–300 amu (standard), up to 2500 amu (optional) |
| Detection Limit | 5 × 10⁻¹⁵ mbar (standard), 1 × 10⁻¹⁶ mbar (optional) |
| Energy Range | ±100 eV (standard), ±1000 eV (optional) |
| Resolution | 0.1% valley, 1% valley |
| Dynamic Range | 10⁷ |
| Measurement Speed | 500 points/s |
| Signal Gating Resolution | 0.1 µs |
| Stability | < ±0.5% peak height drift over 24 h |
| Quadrupole Diameter Options | 6 mm, 9 mm, 12 mm |
| Ion Source Control | Adjustable extraction voltage for soft ionization and appearance potential spectroscopy |
| Detector Options | Pulse ion counting (7-decade dynamic range), Faraday cup (up to 5 × 10¹⁰ ions/s) |
| UHV Compatibility | Standard UHV housing |
| Software | MASsoft Professional Suite |
| Upgrade Path | Compatible with Hiden Plasma/SIMS platforms (EQP, EQS, PSM, Maxim) via energy filter integration (Bessel Box, 45° sector, or electrostatic energy analyser) |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | EQP |
| Mass Range | up to 2500 amu |
| Energy Resolution | 0.05 eV step / 0.25 eV FWHM |
| Ion Detection | Pulse-counting detector with 7-decade dynamic range |
| Signal Gating Resolution | 1 µs |
| Optional Floating Voltage | up to 10 kV |
| Interface | RS232, RS485, or Ethernet LAN |
| Detector Options | Faraday cup (high-density plasmas), electron attachment source (for apparent potential spectroscopy) |
| Vacuum System | Triple-differentially pumped quadrupole with 45° electrostatic sector energy analyser |
| Shielding Options | Mu-metal and radio-metal shielding available |
| Safety | Integrated Penning gauge and interlock system for overpressure protection |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HAL 201 RC |
| Mass Range | 200 / 300 amu |
| Scan Speed | 100 amu/s |
| Minimum Step Size | 0.01 amu |
| Sensitivity | 0.1–1 ppm |
| Long-Term Stability | < ±0.5% peak height over 24 h |
| Minimum Detectable Partial Pressure | 5 × 10⁻¹⁴ mbar |
| Maximum Operating Pressure | 1 × 10⁻⁴ mbar |
| Ion Source | Gold-Plated Dual-Iridium Oxide Filament |
| Detector | Dual Faraday/Channeltron Electron Multiplier |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HAL/3F |
| Mass Range | 1–50 amu (high-resolution quadrupole) |
| Detection Sensitivity | ppm-level |
| Long-term Stability | < ±0.5% peak height drift over 24 h |
| Ionization Modes | Electron Impact (EI), Threshold Ionization (e.g., D₂/He selective detection) |
| Software Control | MASsoft v6.x |
| Data Output | ASCII, DDE-compatible (Excel, SPC-IV, custom SCADA/HMI systems) |
| Compliance | CE-marked, RoHS-compliant, designed for vacuum system integration per ISO 27893 and ASTM E1940-20 |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HALO 201 MBE |
| Mass Range | 1–300 amu |
| Scan Speed | 100 amu/s |
| Minimum Scan Step | 0.01 amu |
| Sensitivity | 0.1–1 ppm |
| Long-Term Stability | < ±0.5% peak height drift over 24 h |
| Minimum Detectable Partial Pressure | 2 × 10⁻¹³ mbar |
| Maximum Operating Pressure | 1 × 10⁻⁴ mbar |
| Detector | Dual Faraday/Channelplate Electron Multiplier |
| Ion Source Shield | Contamination-Resistant |
| Filament Wiring | Molybdenum-Copper Alloy |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR-40 DEMS |
| Mass Range | 50–300 amu |
| Resolution | < 1 amu |
| Sensitivity | 0.1 ppm (standard quadrupole) or 5 ppb (triple-filtered quadrupole option) |
| Electrode Interface | User-coatable Pt/C working electrode + 4 additional electrode ports |
| Membrane | Replaceable nanoscale hydrophobic membrane |
| Ionization | Soft ionization capability |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR-40 |
| Mass Range | 200 / 300 / 510 amu (selectable) |
| Detection Limit | 5 ppb |
| Stability | < ±0.5% peak height over 24 h |
| Ion Source | Liquid Nitrogen-cooled cold trap |
| Inlet Options | 4-channel or 8-channel multiplexed membrane probes |
| Vacuum Protection | Penning gauge + interlock system |
| Control Interface | RS232, RS485, Ethernet LAN |
| Software | MASsoft v6.x |
| Compliance | Designed for GLP/GMP-aligned workflows |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR-80 |
| Mass Range | up to 2500 amu |
| Detection Limit | 5 ppb |
| Inlet Pressure Range | 1 mtorr to atmospheric pressure |
| Ion Source Temperature | Heated, electropolished stainless steel |
| Stability | < ±0.5% peak height over 24 h |
| Calibration | Viscous-flow QIC-corrected inlet with purge capability |
| Control Software | MASsoft |
| Compliance | Designed for UHV/HP vacuum interfaces, compatible with ASTM E1943 (standard guide for mass spectrometry in process analysis), supports GLP/GMP data integrity requirements via audit trail and user access control |
| Brand | Hiden |
|---|---|
| Origin | Austria |
| Model | HPR20 QIC TMS |
| Mass Range | 1–50 / 100 / 200 / 300 / 500 / 1000 amu |
| Sampling Pressure | 100 mbar–2 bar (standard) |
| Response Time | <150 ms |
| Dynamic Range | 7 decades (pulse-counting detector) |
| Detection Limit | 5 ppb |
| Quantification Range | ppm to 100% |
| Stability | ±0.5% peak height over 24 h |
| Scan Speed | 100 amu/s |
| Measurement Rate | 500 data points/sec |
| Capillary | 0.9 m heated quartz inert capillary (up to 200 °C) |
| Ionization | APSI-MS soft ionization |
| External Analog Outputs | 2 standard, up to 16 optional |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR20 |
| Mass Range | up to 510 amu |
| Detection Limit | down to 5 ppb |
| Response Time | < 500 ms |
| Sample Flow Rate | 1–20 cm³/min |
| Sampling Pressure Range | 10 mbar to 2 bar (optional high-pressure inlet up to 30 bar) |
| Capillary Temperature | up to 200 °C |
| Ion Source Pressure Control | Automatic via integrated mass flow controller |
| Cryogenic Trap | Liquid nitrogen-cooled cold finger for condensable species |
| Ionization | Soft electron ionization (EI) with adjustable electron energy |
| Long-Term Stability | ±0.5% peak height drift over 24 h |
| Communication Interfaces | RS232, RS485, Ethernet |
| Software | MASsoft Professional v6.x with GLP-compliant audit trail and calibration management |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR30 |
| Mass Range | Up to 1000 amu |
| Detection Limit | Down to 5 ppb |
| Operating Pressure Range | 1×10⁻⁴ mbar to 1 mbar |
| Ionization | Soft Electron Ionization (EI) with Tunable Energy |
| Sensitivity Optimization | Direct re-entrant sampling orifice + differential pumping stage |
| Stability | < ±0.5% peak height drift over 24 h |
| Control Software | MASsoft v6.x (Windows-based, LAN-capable) |
| Safety Interlocks | Pneumatic isolation valve with pressure- and power-failure actuation |
| Data Acquisition | Simultaneous real-time acquisition, spectral processing, and alarm triggering |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR40 |
| Mass Range | 1–200 amu (optional 300 amu) |
| Detection Limit | 0.1 ppm (or 5 ppb) |
| Minimum Scan Step | 0.01 amu |
| Detector | Faraday Cup / Electron Multiplier |
| Quantitative Output Units | ppm, ppb, % |
| Ionization Mode | Soft Ionization |
| Software | Windows-based acquisition, real-time display & spectral analysis |
| Safety Feature | Fast-acting isolation valve for membrane breach protection |
| Sample Interface | Gas-permeable membrane probe or recirculating water sampler |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | HPR60 |
| Mass Range | 1–2500 amu |
| Sampling Pressure | 20 mbar to 1 bar |
| Detection Limit | 5 ppb to 100% |
| Response Time | <300 ms |
| Stability | ±0.5% peak height over 24 h |
| Data Acquisition Rate | 500 points/s |
| Electron Energy | 100–1000 eV |
| Dynamic Range | 7 decades (pulse-counting detector) |
| Interface | RS232 / RS485 / Ethernet LAN |
| Ion Source Cooling | Liquid nitrogen cryo-panel (optional water-cooled variant) |
| Vacuum Architecture | Integrated vacuum manifold with dedicated backing pump |
| Safety | Built-in Penning gauge and interlock system for overpressure protection |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | IDP |
| Mass Range (Standard) | 1–300 amu |
| Mass Range (Optional) | 500 / 1000 / 2500 amu |
| Detection Speed | 500 points/s |
| Resolution | 0.1% Valley, 1% Valley |
| Dynamic Range | 10⁷ |
| Detection Limit | 5 ppb to 100% |
| Ion Energy Range (Standard) | ±100 eV |
| Ion Energy Range (Optional) | ±1000 eV |
| Gated Signal Resolution | 0.1 µs |
| Long-Term Stability | < ±0.5% peak height drift over 24 h |
| Detector | Pulsed Ion Counting |
| Ion Optics | Four-stage ion lens system with integrated electron/ion source and UHV-compatible housing |
| Interface | RS232, USB, Ethernet |
| Software | MASsoft Professional Control Suite |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | MAXIM |
| Mass Range Options | 300 amu / 500 amu / 1000 amu |
| Mass Analyzer | 3F Quadrupole (9 mm rod diameter) |
| Detector | Pulse-counting ion detector, dual-polarity (positive/negative ions), max. count rate 10⁷ cps |
| Ion Source | Electron Impact (single-filament), configurable for SNMS and Residual Gas Analysis (RGA) |
| Sample Stage Heating | Up to 250 °C |
| Optical Acceptance Angle | 30° for planar particle sampling in SIMS/SNMS geometry |
| Ion Transmission | Optimized for minimal trajectory perturbation across full energy range |
| Depth Profiling Capability | Enhanced via grating-controlled beam optics |