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| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VTC-600G |
| Vacuum Chamber Configuration | Benchtop Front-Loading |
| Ultimate Vacuum | ≤6.0 × 10⁻⁵ Pa |
| Leak Rate | ≤0.5 Pa/h |
| Pumping Time (Atm → 5.0 × 10⁻³ Pa) | ~20 min |
| Vacuum System | Dual-stage (Rotary Vane Pump + Turbomolecular Pump) |
| Substrate Holder | Ø140 mm, Temp. Range: RT–500 °C (±1 °C), Rotation Speed: 5–20 rpm |
| Gas Inlet | 2-channel MFC (Ar & N₂) |
| Target Arrangement | 3 × Ø2″ magnetron cathodes at 120° spacing, 34° tilt angle to substrate normal |
| Target Cooling | Water-cooled |
| Optional Features | RF/DC dual-power configuration, substrate bias module, rotating shutter mask, sample stage baffle |
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