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| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PECVD-300 |
| Vacuum Chamber Dimensions | Φ300 mm × 300 mm |
| Base Pressure (after bake-out) | ≤8.0×10⁻⁵ Pa |
| Ultimate Leak Rate | ≤5.0×10⁻⁷ Pa·L/s |
| Process Pressure Range | 13.3–133 Pa |
| RF Power Supply | 13.56 MHz, 0–300 W, auto-matching |
| Electrode Gap Adjustment | 15–50 mm (graduated scale) |
| Substrate Heating | up to 500 °C, ±1 °C stability |
| Showerhead Diameter | Φ90 mm |
| Gas Inlets | 2 standard MFC channels (100 sccm each) |
| Cooling Water Requirements | 0.2–0.4 MPa pressure, 15–25 °C inlet temperature |
| Total Power Consumption | <4 kW |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | CE-600, CE-800 |
| Applicable Substrate Size | 3–6 inch (CE-600), 3–8 inch (CE-800) |
| Cleaning Pressure Range | 0.1–0.5 MPa |
| Workstage Rotation Speed | 200–3000 rpm |
| Cleaning Duration | 3–1000 s |
| Touchscreen | 7-inch Full-Color HMI |
| Equipment Dimensions | 400 × 800 × 1250 mm |
| Fluid Delivery | Dual-fluid (gas–liquid) nozzle system |
| Chuck Mechanism | Centrifugal automatic locking clamp |
| Spindle Sealing | Aerospace-grade rotary seal |
| Compatible Films | Blue tape, UV-curable tape, PET carrier film, dual-layer adhesive films |
| Control System | Programmable logic controller (PLC) with editable recipe management |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SP-MSM200 |
| Pricing | Upon Request |
| Vacuum Chamber | Ø200 mm × 300 mm |
| Arc Ignition | High-Frequency Start |
| Output Current Range | 20–630 A |
| Electrode | Ø6 mm Tungsten (W), Non-Consumable |
| Max. Melting Temperature | 3500 °C |
| Cooling | Integrated Recirculating Chiller (Deionized Water) |
| Gas Atmosphere | High-Purity Argon (≥99.99%) |
| Standard Vacuum | –0.1 MPa (with Rotary Vane Pump) |
| Optional High Vacuum | 5.0 × 10⁻³ Pa (with Molecular Pump & Capacitance Manometer) |
| Crucible Configuration | 4 positions — three Ø25 mm hemispherical crucibles (20 g stainless steel capacity each), one Ø70 × 15 mm crucible (200 g stainless steel capacity) |
| Furnace Dimensions (L×W×H) | 900 × 600 × 1800 mm |
| Net Weight | 120 kg |
| Power Supply | AC 380 V, 50 Hz, 63 A circuit breaker required |
| Total Power Consumption | <30 kW |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | YT-08 |
| Pricing | Available Upon Request |
| Max Sample Size | 2″ × 3″ (50.8 mm × 76.2 mm) |
| Pressure Source | Mechanical Spring Loading |
| Power Requirement | None |
| Operating Altitude | ≤1000 m |
| Ambient Temperature | 25°C ±15°C |
| Relative Humidity | 55% RH ±10% RH |
| Footprint | 400 mm × 300 mm × 700 mm (W×D×H) |
| Ventilation | Required |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SP-MSM360 |
| Pricing | Upon Request |
| Vacuum Glove Box Dimensions | 1200 × 900 × 750 mm (front-opening), Transfer Chamber: 360 × 600 mm / 150 × 300 mm |
| Purification Performance | H₂O ≤ 1 ppm, O₂ ≤ 1 ppm (with auto-regeneration) |
| Electrode | Ø4 mm Tungsten, Water-Cooled |
| Electrode Travel Range | ≤380 × 300 × 50 mm (X-Y-Z) |
| Crucible Array | 32 × Ø25 mm Water-Cooled Copper Crucibles on 180 × 180 mm Insulated Base |
| Max Melting Temperature | 3500 °C |
| Power Supply | AC 380 V, 50 Hz |
| Output Current | 15–315 A |
| Cooling | KJ-5000 Recirculating Chiller |
| Protective Atmosphere | Ultra-High-Purity Argon (≥99.999%, H₂O ≤ 5 ppm, O₂ ≤ 5 ppm) |
| Safety | Integrated UV/IR-blocking viewing window, mandatory safety goggles required during operation |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SP-MSM130 |
| Pricing | Upon Request |
| Maximum Melting Temperature | >3500 °C |
| Chamber Material | Fused Quartz (transparent) |
| Chamber Dimensions | Ø168 × 142 mm |
| Electrode | Tungsten, Ø4 mm, adjustable angle/height |
| Arc Current Range | 30–255 A DC |
| Crucible Configuration | 5-position water-cooled copper crucible (4 × hemispherical Ø23 × 7 mm + 1 Ta-tube sealing station Ø10–20 mm, L = 30–90 mm) |
| Sample Capacity | ≤8 g per melt (Fe-standardized) |
| Gas Control | Argon atmosphere with pressure gauge (−0.1 to +0.15 MPa) |
| Cooling System | KJ5000 recirculating chiller (6 L reservoir, 16 L/min flow, 2.87 kW refrigeration capacity) |
| Vacuum System | VRD-8 rotary vane pump (KF25 flange, 0.75 kW, ultimate vacuum ≤5 × 10⁻² mbar) |
| Power Supply | WS-250 DC arc source (20 V output, 10–250 A adjustable, 6.3 kVA input) |
| Operating Modes | Ambient air or inert-gas glovebox integration |
| Safety | Integrated quartz shield, interlocked chamber access, thermal overload protection |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic |
| Model | Spherical Pulsed Laser Deposition (PLD) System |
| Pricing | Upon Request |
| Operating Temperature | 10–35 °C |
| Relative Humidity | ≤75% |
| Power Supply | 220 V, Single-Phase, 50 ± 0.5 Hz |
| Max Power Consumption | <4 kW |
| Cooling Water Pressure | 0.2–0.4 MPa |
| Cooling Water Temperature | 15–25 °C |
| Vacuum Chamber | Spherical, Ø300 mm, Manual Front Door |
| Chamber Material | 304 Stainless Steel, TIG-Welded, Glass-Bead Blasted + Electrochemical Passivation |
| Ultimate Vacuum | ≤6.67×10⁻⁵ Pa (after bake-out, with 600 L/s turbo-molecular pump & 8 L/s backing pump) |
| Leak Rate | ≤5.0×10⁻⁷ Pa·L/s |
| Pump-Down Time to 8.0×10⁻⁴ Pa | ≤40 min |
| Vacuum Hold (12 h, pump-off) | ≤20 Pa |
| Substrate Holder | Ø40 mm, 1–20 RPM rotation |
| Substrate-to-Target Distance | 40–90 mm |
| Max Substrate Temperature | 800 °C, Temp Control Accuracy: ±1 °C |
| Rotating Target Carousel | 4 Positions, Ø40 mm per target, individual shuttering, coaxial laser incidence |
| Integrated Features | In-chamber bake-out heater, LED illumination, water-pressure alarm |
| Gas Flow Control | 1 Channel MFC, 0–100 sccm |
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