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| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | ESPion |
| Probe Type | Electrically Compensated, RF-Shielded Langmuir Probe |
| Operating Frequency Range | DC to 13.56 MHz |
| Maximum Scan Rate | 15 sweeps per second |
| Probe Drive Options | 300 mm / 600 mm / 915 mm motorized linear actuators, optional linear-rotary combi-drive |
| Cooling | Gas-cooled multi-sensor chain for high-temperature plasma operation |
| Compensation | Passive RF compensation (4.25 MΩ @ 13.56 MHz), reference probe for low-frequency drift & noise rejection |
| Data Interface | RS232, RS485, Ethernet LAN |
| Software | ESPsoft v5.x with pulse-gating, EEDF reconstruction, and automated plasma parameter extraction |
| Compliance | Designed for GLP-compliant plasma diagnostics |
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