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| Brand | Hitachi |
|---|---|
| Origin | Japan |
| Manufacturer | Hitachi High-Tech Science Corporation |
| Product Type | Non-contact 3D Optical Profilometer / Surface Roughness Analyzer |
| Operating Principle | White-Light Interferometry |
| Model | VS1800 |
| Compliance | ISO 25178-2:2012, ISO 25178-601:2013, ISO 25178-602:2013 |
| Vertical Resolution | ≤ 0.01 nm (Phase-Shifting Mode) |
| Repeatability | < 0.1% (Z-height) |
| Field of View | Up to 6.4 mm × 6.4 mm (single-shot) |
| Measurement Speed | As fast as 5 seconds per acquisition (typical) |
| Optional Module | Large-Inclination Angle Measurement Kit |
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