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| Brand | k-Space Associates |
|---|---|
| Origin | USA |
| Model | kSA MOS US |
| Scan Area | 300 mm × 300 mm (up to 2 m optional) |
| Scanning Speed | up to 20 mm/s (X/Y) |
| Positional Resolution | 1 µm |
| Mean Curvature Resolution | 5 × 10⁻⁵ m⁻¹ (1σ) |
| Stress Measurement Range | 3.2 × 10⁵ Pa to 7.8 × 10⁹ Pa (1σ) |
| Stress Resolution | < 0.32 MPa or 1% (1σ) |
| Stress Repeatability | 0.02 MPa (1σ) |
| Curvature Repeatability | < 5 × 10⁻⁵ m⁻¹ (1σ) |
| Measurement Modes | Region-of-Interest, Linear Multi-Point, Full-Sample Scan |
| Output | 2D curvature mapping, quantitative stress distribution imaging, radius of curvature, wafer bow, and stress intensity |
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