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| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Model | ECCS B320 |
| Instrument Type | Point-Scanning Confocal Microscope |
| Light Source | Xenon Lamp + White-Light Laser Source |
| Detector | High-Sensitivity Photomultiplier Detector |
| Scanning Module | Integrated Scanner-Microscope Architecture |
| Scanning Mode | XYZ Triaxial Scanning |
| Objective Lenses | 10× to 100× (Selectable) |
| Software & Workstation | Operando Imaging Suite |
| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Instrument Type | Point-Scanning Confocal Microscope |
| Vertical Resolution | 0.05 nm |
| Laser Source | 405 nm Semiconductor Laser |
| Detector | High-Sensitivity Photodetector |
| Scanning Module | Integrated Scanner-Microscope Architecture |
| Scanning Axes | XYZ |
| Maximum Scan Rate | 120 Hz |
| Optical Zoom | 0.1× Continuous Zoom |
| Objective Lenses | 10× to 150× |
| Microscope Illumination | White Light + Six Discrete Wavelengths (Selectable) |
| Software Platform | LM Eye, LIBRA, LM Inspect |
| Vibration Isolation Table | 1200 × 900 mm Dedicated Anti-Vibration Platform |
| XY Stage Control | Motorized or Manual Selection |
| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Model | HYBRID+ |
| Instrument Type | Point-Scanning Confocal Microscope |
| Vertical Resolution | 0.05 nm |
| Laser Source | 405 nm semiconductor laser |
| LED Light Source | White LED & Xenon lamp |
| Scan Modes | White-light confocal, laser confocal, differential interference contrast (DIC), vertical white-light interferometry (VWLI), phase-shift interferometry (PSI), spectral reflectometric thin-film metrology |
| Scan Axes | XYZ |
| Objective Magnification Range | 1×–150× |
| Optical Platform | Hybrid dual-confocal architecture |
| Vibration-Isolation Table | 1200 × 900 mm dedicated anti-vibration platform |
| Compliance | ASTM E2927, ISO 25178-2, ISO 10110-7, JIS B 0601, USP <1059>, FDA 21 CFR Part 11 (software audit trail enabled) |
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