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| Brand | ProOpto |
|---|---|
| Origin | Germany |
| Model | DUV/EUV |
| Spectral Range | 190–1100 nm (with quantum conversion coating) |
| Field of View | 9 mm × 6.7 mm (customizable) |
| Dynamic Range | 14-bit |
| Hartmann Plate | precision pinholes Ø75 µm, 250 µm pitch |
| Tilt Range | ±10° |
| XY Adjustment Range | ±10 mm |
| UHV Compatibility | CF63 flange |
| Single-Pulse Repeatability (EUV) | λ/116 wrms at λ = 13.5 nm |
| Camera Support | >20 models |
| Brand | Kokyo |
|---|---|
| Origin | Asia |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | DV-HP Series |
| Beam Diameter Range | 2 µm – 800 mm |
| Wavelength Range | 190 nm – 16 µm |
| Power Density Range | 0.001 W/m² – 100 kW/m² |
| Software & Hardware Customization | Available |
| Compliance | ISO 11146-1:2022, ISO 13694:2022, ANSI Z136.1-2022 |
| Core Components | Thermally Stabilized CMOS/InGaAs Sensor Array, Water-Cooled Aperture Module, Precision Attenuation Stack |
| Brand | Kokyo |
|---|---|
| Origin | Imported (Asia) |
| Model | Beam Profiler |
| Beam Diameter Range | 2 µm to 800 mm |
| Wavelength Range | 190 nm to 16 µm |
| Power Density Range | 0.001 W/m² to 100 kW/m² |
| Compliance | Designed for ISO 11146-1/-2, ISO 13694, and ANSI Z136.1 alignment |
| Brand | k-Space |
|---|---|
| Origin | USA |
| Distributor Status | Authorized Distributor |
| Import Status | Imported |
| Model | BandiT PV |
| Price Range | USD 42,000 – 70,000 |
| Light Source | AAA-Class Steady-State Solar Simulator |
| Spectral Range | 350–1700 nm |
| Temperature Measurement Range | RT to 1300 °C |
| Temperature Resolution | 0.1 °C |
| Measurement Capabilities | Optical Band Gap, Spectral Absorption Profile, Film Thickness & Deposition Rate, Surface Roughness, In-Situ Thermal Monitoring |
| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Model | ECCS B320 |
| Instrument Type | Point-Scanning Confocal Microscope |
| Light Source | Xenon Lamp + White-Light Laser Source |
| Detector | High-Sensitivity Photomultiplier Detector |
| Scanning Module | Integrated Scanner-Microscope Architecture |
| Scanning Mode | XYZ Triaxial Scanning |
| Objective Lenses | 10× to 100× (Selectable) |
| Software & Workstation | Operando Imaging Suite |
| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Instrument Type | Point-Scanning Confocal Microscope |
| Vertical Resolution | 0.05 nm |
| Laser Source | 405 nm Semiconductor Laser |
| Detector | High-Sensitivity Photodetector |
| Scanning Module | Integrated Scanner-Microscope Architecture |
| Scanning Axes | XYZ |
| Maximum Scan Rate | 120 Hz |
| Optical Zoom | 0.1× Continuous Zoom |
| Objective Lenses | 10× to 150× |
| Microscope Illumination | White Light + Six Discrete Wavelengths (Selectable) |
| Software Platform | LM Eye, LIBRA, LM Inspect |
| Vibration Isolation Table | 1200 × 900 mm Dedicated Anti-Vibration Platform |
| XY Stage Control | Motorized or Manual Selection |
| Brand | Kokyo |
|---|---|
| Origin | Imported (Asia) |
| Model | Larger-area Beam Profiler |
| Wavelength Range | 190 nm – 16 µm |
| Beam Diameter Measurement Range | 2 µm – 800 mm |
| Irradiance Range | 0.001 W/m² – 100 kW/m² |
| Detector Type | Semiconductor-based imaging sensor array |
| Customization | Hardware and software configurable |
| Compliance | Designed for ISO 11146-1/2, ISO 13694, and ANSI Z136.1 alignment |
| Brand | Kokyo |
|---|---|
| Model | LA |
| Aperture Range | 2 µm to 800 mm |
| Wavelength Range | 190 nm – 16 µm |
| Power Density Range | 0.001 W/m² – 100 kW/m² |
| Origin | Imported (Asia) |
| Compliance | ISO 11146-1:2005, ISO 13694:2003, ANSI Z136.1 |
| Software | Customizable beam analysis suite with multi-camera synchronization |
| Hardware Options | Modular detector heads (CMOS/InGaAs/MCT), motorized attenuators, calibrated ND filters, beam sampling optics |
| Brand | Lasertec |
|---|---|
| Origin | Japan |
| Model | HYBRID+ |
| Instrument Type | Point-Scanning Confocal Microscope |
| Vertical Resolution | 0.05 nm |
| Laser Source | 405 nm semiconductor laser |
| LED Light Source | White LED & Xenon lamp |
| Scan Modes | White-light confocal, laser confocal, differential interference contrast (DIC), vertical white-light interferometry (VWLI), phase-shift interferometry (PSI), spectral reflectometric thin-film metrology |
| Scan Axes | XYZ |
| Objective Magnification Range | 1×–150× |
| Optical Platform | Hybrid dual-confocal architecture |
| Vibration-Isolation Table | 1200 × 900 mm dedicated anti-vibration platform |
| Compliance | ASTM E2927, ISO 25178-2, ISO 10110-7, JIS B 0601, USP <1059>, FDA 21 CFR Part 11 (software audit trail enabled) |
| Brand | ProOpto |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | EUV/NIR |
| Pricing | Upon Request |
| Camera Interface | USB 3.0 |
| Spatial Resolution | <10 µm |
| Spectral Range | 1100 nm (NIR) to 1 nm (soft X-ray) |
| Compliance | ISO 11146, ISO 13694, ISO 11670, ISO 15367 |
| Supported Camera Types | >20 models |
| Brand | ProOpto |
|---|---|
| Origin | Germany |
| Type | Imported Instrument |
| Model | EUV/XUV |
| Core Light Source Compatibility | Free-Electron Laser (FEL) |
| Wavelength Range | 1–60 nm |
| Field of View | 9 mm × 6.7 mm (optional larger FOV) |
| Dynamic Range | 14-bit |
| Hartmann Plate | Precision pinholes Ø75 µm, pitch 250 µm |
| Tilt Range | ±10° |
| XY Translation Range | ±10 mm |
| UHV-Compatible Flange | CF63 |
| Single-Pulse Wavefront Repeatability | λ/116 wrms @ 13.5 nm |
| Compliance | ISO 11146, ISO 13694, ISO 11670, ISO 15367 |
| Camera Interface | Supports ~20 commercial scientific camera models |
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