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| Brand | Anric |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT |
| Substrate Size | 4–6 inch |
| Process Temperature Range | RT to 350 °C |
| Precursor Channels | 5 |
| Weight | 50–70 kg |
| Dimensions (W × H × D) | 50 cm × 75 cm × 75 cm |
| Thickness Uniformity | ±1% |
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