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| Brand | KLA |
|---|---|
| Model | Zeta 20 |
| Origin | China (Guangdong) |
| Manufacturer Type | Authorized Distributor |
| Product Origin Classification | Domestic |
| Price | USD 98,000 (FOB Guangdong) |
| Measurement Principle | Multi-Mode Optical Interferometry & ZDot™ Confocal Imaging |
| Max. Vertical Range | >10 mm |
| Vertical Resolution | Sub-nanometer (typ.) |
| Lateral Resolution | ≤ 0.4 µm |
| Film Thickness Range | 1 nm – 50 µm (with integrated broadband reflectometry) |
| Sample Stage | Motorized XYZ with 100 mm × 100 mm travel |
| Software Platform | ZetaWare v6.x |
| Compliance | ISO 25178-2, ASTM E2981, SEMI S2/S8, GLP/GMP-ready audit trail |
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