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| Brand | KLA |
|---|---|
| Model | Zeta 20 |
| Origin | China (Guangdong) |
| Manufacturer Type | Authorized Distributor |
| Product Origin Classification | Domestic |
| Price | USD 98,000 (FOB Guangdong) |
| Measurement Principle | Multi-Mode Optical Interferometry & ZDot™ Confocal Imaging |
| Max. Vertical Range | >10 mm |
| Vertical Resolution | Sub-nanometer (typ.) |
| Lateral Resolution | ≤ 0.4 µm |
| Film Thickness Range | 1 nm – 50 µm (with integrated broadband reflectometry) |
| Sample Stage | Motorized XYZ with 100 mm × 100 mm travel |
| Software Platform | ZetaWare v6.x |
| Compliance | ISO 25178-2, ASTM E2981, SEMI S2/S8, GLP/GMP-ready audit trail |
| Brand | Scientech |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Domestic Product Classification | Yes |
| Model | 12-inch |
| Pricing | Available Upon Request |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CS1 |
| Pricing | Available Upon Request |
| Substrate Diameter Range | 2 in. – 200 mm |
| Substrate Thickness Range | 350 μm – 1,100 μm |
| Material Compatibility | Opaque or transparent polished surfaces with ≥10% light scattering efficiency |
| Defect Detection Sensitivity | 0.3 μm PSL sphere equivalent (≥95% capture rate on bare Si) |
| Minimum Detectable Features | Scratches (100 μm × 0.1 μm × 50 Å), Pits (20 μm Ø × 50 Å depth), Stains (20 μm Ø × 10 Å thickness) |
| Signal Threshold | Defect signal amplitude >3× peak-to-valley background noise |
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