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| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | Filmetrics R50 |
| Automation Level | Manual |
| Sheet Resistance Range | 1 mΩ/□ – 200 MΩ/□ |
| Sheet Resistance Accuracy | ±1% |
| Substrate Size Compatibility | 4-inch to 12-inch wafers |
| Software | RSMapper™ |
| Probe Compatibility | Fully compatible with KLA’s full suite of four-point probe sensors |
| XY Stage | 200 mm motorized |
| Z-Travel | 100 mm precision-controlled |
| Measurement Configurations | Customizable grid, linear, radial, and user-defined point patterns |
| Application Scope | Conductive & semiconducting thin films on Si, GaAs, SiC, sapphire, glass, and flexible substrates |
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