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| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-170 |
| Pricing | Available Upon Request |
| Measurement Principle | Capacitive Sensing |
| Measurement Range | 0–1000 µm |
| Accuracy | ±0.5 nm |
| Probe Tip Radius | 2.0 µm |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | Up to 200 mm (Seamless, No Stitching Required) |
| Step Height Repeatability | 0.4 nm |
| Vertical Resolution | 0.001 nm |
| Maximum Sample Size | 200 mm Diameter |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Fimetrics P3D |
| Measurement Principle | White-Light Interferometry |
| Type | Non-Contact 3D Surface Profilometer / Roughness Analyzer |
| Key Resolution | Sub-nanometer vertical resolution (≤0.1 nm typical) |
| Field-of-View Scalability | Multi-field stitching enabled |
| Optical Configuration | Phase-shifting and vertical-scanning interferometry (CSI) |
| Compliance Basis | Designed for ISO 25178-2, ISO 4287, ASTM E1392, and VDI/VDE 2634 Part 3 |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Price | USD 75,000 (FOB) |
| Measurement Principle | Capacitive Probe-Based Profilometry |
| Vertical Measurement Range | 0–1000 µm |
| Vertical Accuracy | ±0.5 Å |
| Tip Radius | 2.0 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 150 mm (single-pass, no stitching required) |
| Step Height Repeatability | ≤4 Å |
| Vertical Resolution | ≤0.01 Å |
| Maximum Sample Diameter | 150 mm |
| Platform Positioning Repeatability | 2 µm |
| Max Sample Height | ≥30 mm |
| Optical Zoom | 4× (motorized) |
| Camera | 5 MP color CCD |
| Digital Magnification | 4× |
| Vibration Isolation Requirement | ≤250 µin/sec (1–100 Hz) |
| Ambient Noise Limit | ≤80 dB(A) |
| Airflow Limit | ≤100 ft/min |
| Dimensions (W×D×H) | 430 × 570 × 670 mm |
| Weight | 80 kg |
| Brand | KLA |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | D500 |
| Price Range | USD 42,000 – 56,000 (FOB) |
| Measurement Principle | Optical Lever-Based Contact Profilometry |
| Vertical Measurement Range | 10 nm – 1000 µm |
| Vertical Accuracy | ±0.01% of full-scale range |
| Probe Tip Radius | 2 µm |
| Adjustable Normal Force | 0.03–15 mg |
| Maximum Single-Scan Length | 30 mm |
| Step Height Repeatability | 0.5 nm (RMS, measured on 1 µm SiO₂ step standard over 15 repeated scans) |
| Vertical Resolution | 0.038 nm |
| Maximum Sample Size | 140 mm diameter circular stage |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CS1 |
| Pricing | Available Upon Request |
| Substrate Diameter Range | 2 in. – 200 mm |
| Substrate Thickness Range | 350 μm – 1,100 μm |
| Material Compatibility | Opaque or transparent polished surfaces with ≥10% light scattering efficiency |
| Defect Detection Sensitivity | 0.3 μm PSL sphere equivalent (≥95% capture rate on bare Si) |
| Minimum Detectable Features | Scratches (100 μm × 0.1 μm × 50 Å), Pits (20 μm Ø × 50 Å depth), Stains (20 μm Ø × 10 Å thickness) |
| Signal Threshold | Defect signal amplitude >3× peak-to-valley background noise |
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