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| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Fimetrics P3D |
| Measurement Principle | White-Light Interferometry |
| Type | Non-Contact 3D Surface Profilometer / Roughness Analyzer |
| Key Resolution | Sub-nanometer vertical resolution (≤0.1 nm typical) |
| Field-of-View Scalability | Multi-field stitching enabled |
| Optical Configuration | Phase-shifting and vertical-scanning interferometry (CSI) |
| Compliance Basis | Designed for ISO 25178-2, ISO 4287, ASTM E1392, and VDI/VDE 2634 Part 3 |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CS1 |
| Pricing | Available Upon Request |
| Substrate Diameter Range | 2 in. – 200 mm |
| Substrate Thickness Range | 350 μm – 1,100 μm |
| Material Compatibility | Opaque or transparent polished surfaces with ≥10% light scattering efficiency |
| Defect Detection Sensitivity | 0.3 μm PSL sphere equivalent (≥95% capture rate on bare Si) |
| Minimum Detectable Features | Scratches (100 μm × 0.1 μm × 50 Å), Pits (20 μm Ø × 50 Å depth), Stains (20 μm Ø × 10 Å thickness) |
| Signal Threshold | Defect signal amplitude >3× peak-to-valley background noise |
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