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| Brand | SEMICS |
|---|---|
| Origin | South Korea |
| Model | OPUS-SH / OPUS-SD / OPUS3 / OPUS-SS |
| Wafer Compatibility | 6", 8", and 12" (SEMI-compliant) |
| Dimensions (W×D×H) | OPUS-SH: 1490 × 1680 × 960 mm |
| OPUS-SD | 1530 × 1782 × 960 mm |
| XY Travel Range | ±175 mm (SH), ±185 mm × ±175 mm (SD) |
| XY Positioning Accuracy | ±1.5 µm |
| Maximum Downforce | 500 kgf |
| Temperature Range Options | Ambient to +150 °C, -40 °C to +150 °C, -55 °C to +200 °C, and 25 °C environmental chamber control |
| Structural Architecture | Rigid Z-frame with flat-load configuration |
| Key Functionalities | Real-time configuration validation, smart pin alignment algorithm, intelligent probing path optimization, map-shift prevention, drawer-type (SH) or universal probe card interface (SD/OPUS3), full pogo-pin tester compatibility |
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