- All
- Favorite
- Popular
- Most rated
| Brand | Spin-ION |
|---|---|
| Origin | France |
| Model | Helium-S® |
| Ion Species | He⁺ (also capable of H⁺ generation) |
| Implantation Energy Range | 1–30 keV |
| Energy Resolution | <50 eV |
| Beam Current Range | 1–50 μA (energy-dependent) |
| Typical Ion Flux | 1×10¹⁵ ions/cm²/min at 10 μA |
| Uniform Irradiation Area | 25 mm × 25 mm |
| Beam Uniformity | Intensity ±1%, Angular ±3° |
| Beam Purity | ≥99.99% (1:10⁴ contaminant ratio) |
| Vacuum Base Pressure | ≤1×10⁻⁷ mbar |
| Ion Source | Electron Cyclotron Resonance (ECR) |
| Beam Filtering | Wien Filter |
| Scanning | X-Y electrostatic deflection |
| Sample Holder | 25 mm diameter wafers/disks |
| Optional Accessories | In-situ heating stage (up to 500 °C), angular tilt module, load-lock rapid transfer chamber |
| Compliance | Designed for integration into UHV systems |
Show next