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| Brand | RHK Technology |
|---|---|
| Origin | USA |
| Model | R10 |
| Type | Integrated Digital SPM Control Platform |
| FPGA Architecture | Reconfigurable Xilinx UltraScale+ |
| Data Channels | 64+ synchronized analog/digital I/O |
| Scan Speed | Up to 5× faster than R9 |
| HV Output Noise | ≤25% of R9 baseline |
| Dual SPM System Support | Yes |
| Position Resolution (Z modulation) | Down to 10 pm RMS |
| Bias Modulation | 10 µV–10 Vpp, DC–10 MHz |
| ADC/DAC Resolution | 16–24 bit, adaptive sampling up to 100 MS/s |
| Compliance | Fully compatible with ASTM E2531, ISO/IEC 17025 workflows, and GLP/GMP data integrity requirements (21 CFR Part 11 audit trail ready via optional software module) |
| Brand | Attocube Systems AG |
|---|---|
| Origin | Germany |
| Model | IDS3010 |
| Light Source | Single-frequency laser |
| Measurement Range | 0–5 m |
| Linear Measurement Accuracy | ±1 pm |
| Sampling Bandwidth | 10 MHz |
| Operating Environment | 10 mK, 1×10⁻¹⁰ mbar vacuum, up to 10 MGy radiation tolerance |
| Interface Options | HSSL, AquadB, CANopen, Profibus, EtherCAT |
| Probe Wavelengths | 650 nm (alignment), 1530 nm (measurement) |
| Probe Spot Sizes | 2 µm to 7.6 mm (depending on configuration) |
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