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| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235 (Q-Series) |
| Type | Benchtop Microwave Plasma Asher/Stripper |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & MEMS Fabrication |
| Compliance | CE-marked, ISO 9001–certified manufacturing, compatible with cleanroom Class 100/ISO 5 environments |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150, Q235, Q240, Q310 |
| Type | Microwave-excited Capacitively Coupled Plasma (CCP) Resist Stripping System |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & Back-End-of-Line (BEOL) Processing, MEMS Fabrication, Advanced Packaging |
| Compliance | CE Marked, SEMI S2-0216 Certified, ISO 9001:2015 Quality Management System |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL76 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber Volume | 76 L (400 × 400 × 490 mm, aluminum) |
| External Dimensions | 1050 × 800 × 2020 mm (incl. tri-color status tower) |
| Gas Inlets | 3 standard mass flow-controlled lines (MKS digital controllers) |
| Optional | 4th gas line, ECR enhancement, φ350 mm adjustable-speed rotating stage, dry pump package, UV/microwave-shielded viewport, hinged + drawer-type vacuum door |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q240 |
| Plasma Source | 2.45 GHz, 1200 W |
| Chamber | Quartz, Ø240 mm × 460 mm (21 L), accommodates up to 200 mm wafers |
| Dimensions (L×W×H) | 760 × 775 × 775 mm |
| Gas Lines | 3 standard + optional 4th line |
| Mass Flow Controllers | Digital MKS |
| Vacuum Door | Drawer-type with UV/microwave-shielded viewport |
| Wafer Chuck | Temperature-controlled |
| HMI | 10.4" touchscreen, Windows CE OS |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL8 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Volume | 18 L (250 × 250 × 290 mm, aluminum) |
| External Dimensions | 530 × 600 × 550 mm |
| Gas Delivery | 1 standard mass flow-controlled line (MKS digital controller) |
| Vacuum Door | Hinged with UV- and microwave-shielded viewport |
| Control Interface | 7" GUI touchscreen, Windows CE OS |
| Optional | Dry pump system, tri-color status tower light, up to 4 gas lines, motorized φ200 mm rotating stage, ECR enhancement module |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235/Q240 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber | Quartz, Ø235 mm × 260 mm L |
| Max Wafer Size | 200 mm (8″) |
| Dimensions (L×W×H) | 460 × 590 × 550 mm |
| Gas Inlets | 2 standard + optional up to 4 |
| Mass Flow Controllers | Digital MKS type |
| Chamber Door | Drawer-type with UV/microwave-shielded viewport |
| Substrate Holder | Temperature-controlled wafer chuck |
| Control Interface | 7″ GUI touchscreen, Windows CE OS |
| Optional | Dry vacuum pump system, Faraday cage, quartz boat, tri-color status beacon |
| Brand | PolyPico |
|---|---|
| Origin | Denmark |
| Model | UniA6 |
| Imprint Methods | Thermal, UV (365 nm), Vacuum-assisted |
| Max Substrate/Stamp Diameter | 210 mm (8″) |
| Chamber Height | 20 mm |
| Max Imprint Pressure | 11 bar |
| Thermal Range | Up to 200 °C (optional 250 °C module) |
| UV Wavelengths | 365 nm (standard), 405 nm (optional) |
| Vacuum Level | ≤ 0.1 mbar |
| Control | Fully automated via laptop-based software |
| Form Factor | Benchtop, modular, plug-and-play |
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