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| Brand | PHI |
|---|---|
| Origin | Japan |
| Model | PHI 700 |
| Type | Scanning Auger Electron Spectrometer |
| Detection Principle | Auger Electron Spectroscopy (AES) |
| Spatial Resolution | <10 nm (typical) |
| Beam Energy Range | 1–20 keV (electron gun) |
| Depth Profiling Capability | Sub-nanometer to several micrometers |
| Energy Resolution | ≤0.3% (ΔE/E at E = 1 keV) |
| Imaging Magnification | Up to 500,000× |
| Vacuum System | Ultra-High Vacuum (UHV), ≤5×10⁻¹⁰ Torr base pressure |
| Sample Stage | High-precision motorized XYZ + tilt/rotation |
| Compliance | ASTM E1508, ISO 18115-2, USP <1057>, GLP/GMP-ready data audit trail |
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