Empowering Scientific Discovery

Oxford Instruments Technology (Shanghai) Co., Ltd.

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BrandAgar Scientific / Oxford Instruments
OriginUK
ModelAGB7341
Chamber Dimensions120 mm Ø × 120 mm H (optional 150 mm × 165 mm)
Sample Stage Capacity12 standard pin-type stubs
Stage Height Adjustment Range0–60 mm
Sputter HeadLow-voltage planar magnetron
Target Diameter/Thickness57 mm Ø × 0.1 mm
Standard Target MaterialAu
Optional TargetsPt, Au/Pd, Pt/Pd, Ag
Max Current40 mA
Current Control Range0–50 mA
Vacuum RangeAtmosphere to 1 × 10⁻³ mbar
Process GasArgon (≥99.9% purity)
Pumping Speed2 L/s mechanical pump
Power Supply220 V, 50/60 Hz
Digital Timer0–300 s with pause function
Safety FeaturesVacuum interlock, over-current protection
Optional Quartz Crystal Thickness MonitorIn-situ nanoscale monitoring (resolution: 0.1 nm)
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BrandAgar Scientific / Oxford Instruments
OriginUnited Kingdom
ModelAGB7367A
Chamber Dimensions120 mm Ø × 120 mm H (glass)
Sample StageStainless steel, accommodates up to 12 pin-type stubs, height adjustable over 30 mm range
Evaporation SourceHigh-purity graphite rod, 6.15 mm diameter
Power ControlMicroprocessor-based, remote voltage/current sensing
Max Current180 A
Voltage Range0.1–5.5 V (digital setpoint)
Current Range0–200 A
Vacuum GaugeAnalog, 1 atm to 0.001 mbar
Pumping Speed2 L/s mechanical pump, reaches ≤0.1 mbar in 25–30 s
Operating Voltage220 V, 50/60 Hz
Optional QCM Thickness Monitor6 MHz quartz crystal, in-situ nanometric resolution (±0.1 nm for carbon)
SafetyVacuum interlock, overcurrent protection
Operation ModesAutomatic (programmable timer: 1–30 s) and manual
Auto-vent FunctionYes
CompatibilityZeiss, JEOL, Hitachi, Thermo Fisher (FEI), Tescan, Phenom SEM platforms
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