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| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Model | MDPspot |
| Type | Contactless, Microwave Photoconductance Decay (μ-PCD) Based Lifetime Tester |
| Sample Handling | Manual Z-axis adjustment (up to 156 mm height) |
| Measurement Mode | Single-point, non-contact, room-temperature operation |
| Material Compatibility | Crystalline and multicrystalline silicon wafers & bricks |
| Compliance | Designed for R&D and process monitoring in PV and semiconductor fabrication environments |
| Software | MDP Control Suite (Windows-based, real-time visualization, CSV export, GLP-compliant data logging) |
| Brand | MicroChem Corp |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Product Line | AZ1500 Series |
| Solvent System | Propylene Glycol Monomethyl Ether Acetate (PGMEA) |
| UV Sensitivity Range | 310–440 nm (i-, h-, g-line) |
| Recommended Development Time | AZ1500/AZ1514H: 50–60 s |
| AZ1500HS | 20–30 s |
| Compatible Developers | AZ 351B (1:4 dilution), 0.5% NaOH, AZ 726MIF |
| Film Thickness Range | 0.5–4.0 μm (spin-coated) |
| Storage Conditions | 0–25°C, sealed container, light-protected |
| Shelf Life | Batch-specific (see label: YYYY/MM/DD) |
| Compliance | Fully compatible with standard semiconductor cleanroom protocols and ISO Class 5–7 environments |
| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Model | MDPinline |
| Application | In-line quantitative minority carrier lifetime mapping of silicon wafers |
| Measurement Principle | Microwave-detected photoconductance decay (µ-PCD) |
| Scan Speed | <1 second per wafer |
| Integration | Conveyor-compatible, no moving mechanical parts |
| Compliance | Designed for semiconductor manufacturing environments compliant with ISO 9001 and SEMI S2/S8 safety standards |
| Software Interface | Ethernet-enabled, supports SECS/GEM protocol for factory automation integration |
| Data Output | Full-wafer lifetime map (pixel-resolved), dual-line resistivity profile, CSV/HDF5 export |
| Calibration | Traceable to NIST-traceable reference wafers |
| Operating Environment | Class 1000 cleanroom compatible (ISO 4), 18–28 °C, <60% RH non-condensing |
| Power Supply | 100–240 V AC, 50/60 Hz, <500 W |
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