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| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | SpectraRay/4 |
| Spectral Range | Configurable per instrument integration (e.g., 190–1700 nm) |
| Spot Size | Instrument-dependent (typically 10–100 µm) |
| Incidence Angle | Adjustable (40°–90°, motorized goniometer support) |
| Measurement Speed | Up to 100 ms per spectrum (full spectral acquisition) |
| Single-Measurement Time | < 5 s (typical auto-alignment + acquisition + fit) |
| Sample Size Compatibility | Up to Ø300 mm wafers or custom substrates |
| Spectral Resolution | ≤ 1 nm (dependent on spectrometer configuration) |
| Thickness Measurement Accuracy | Sub-nanometer for single-layer SiO₂ on Si (calibration traceable to NIST standards) |
| Repeatability | ≤ ±0.05 nm (1σ, over 24 h, controlled environment) |
| Direct Reflectance Accuracy | ±0.2% absolute reflectance (NIST-traceable calibration source) |
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