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| Brand | PancanNano |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Equipment |
| Model | SII |
| Product Type | High-Energy Single-Ion Implanter |
| Application Domain | IC & Quantum Device Fabrication |
| Implantation Energy | Custom-configurable per ion species (e.g., 1–100 keV) |
| Ion Dose Range | 1 to 10⁶ ions per site (single-ion counting mode) |
| Wafer Compatibility | Up to 150 mm (6″) substrates, compatible with diced chips and bulk crystals |
| Supported Ions | H⁺, N⁺, O⁺, Si⁺, P⁺, B⁺, As⁺, Te⁺, Ar⁺ (and other singly charged species via optional source modules) |
| Dimensions (L × W × H) | 2.4 m × 1.8 m × 2.2 m (fully shielded vacuum enclosure) |
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