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| Brand | AdNaNo |
|---|---|
| Origin | USA |
| Model | Customized-5 |
| Maximum Substrate Size | 8-inch |
| Vacuum System | High-vacuum compatible (customizable base pressure ≤ 5×10⁻⁷ Torr) |
| Evaporation Sources | Dual resistive-heating crucibles (compatible with metals & organics) |
| Control Options | Manual and fully automated PLC-based operation |
| Substrate Heating | Integrated temperature-controlled stage (up to 300 °C, ±1 °C stability) |
| Compliance | Designed for ISO 14644-1 Class 5 cleanroom integration |
| Software Interface | RS-485/Modbus-enabled for SCADA or LabVIEW integration |
| Brand | AdNaNo |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | Customized-6 |
| Vacuum Chamber Dimensions | Custom |
| Base Pressure | ≤6.0 × 10⁻⁵ Pa |
| Evaporation Sources | 6 × 40 cm³ Crucibles |
| Substrate Heating Capability | Up to 300 °C |
| Intra-Wafer Thickness Uniformity | ≤ ±3% |
| Substrate Holder Configurations | Arch-type and Planetary-type Rotating Fixtures |
| Control System | Fully Automated Process Sequencing |
| Sample Size & Quantity | Fully Customizable |
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