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| Brand | ULVAC KIKO |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Regional Classification | Domestic (PRC) |
| Model | Customized |
| Product Type | High-Energy Ion Implanter |
| Implant Dose Range | 1×10¹¹ – 1×10¹⁶ atoms/cm² |
| Wafer Sizes Supported | 2", 3", 4", 6", 8" |
| Available Ion Species | B, P, As, Al, S, H, Mg, Si |
| Single-Charge Ion Acceleration Energy | ≥200 keV (with deceleration down to 5 keV) |
| Dose Accuracy | ≤±1.5% |
| Ion Source Configuration | 5-channel solid-source vaporizer (up to 700 °C) |
| Tilt Angles | 0° and 7° (room-temperature stage) |
| Vacuum Performance | Ion Source ≤7×10⁻⁴ Pa |
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