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| Brand | YXLON International GmbH |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Customized |
| Pricing | Upon Request |
| Radiation Source | Dual-tube microfocus/nanofocus X-ray (225 kV / 190 kV) |
| Sample Max. Diameter | 530 mm |
| Sample Max. Height | 800 mm |
| Max. Sample Weight | 27 kg |
| Spatial Resolution | Sub-micron (≤1 µm detectable defect) |
| Scan Modes | Cone-beam CT, Helical CT, QuickScan®, Quality Scan, Virtual Rotation Axis, FoV Expansion, Batch Scanning |
| Software Platform | Gemini CT |
| Metrology Accuracy (optional) | MPESD = 5.9 µm + L/75 (L in mm) |
| Compliance | SEMI® S2-0818, SEMI® S8-0218 |
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