- All
- Favorite
- Popular
- Most rated
| Brand | ZOLIX |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Optical Defect Inspection System for Semiconductor Wafers |
| Model | SPM300 |
| Excitation Wavelength | 532 nm (standard), 275 nm UV optional |
| Laser Power | 50 mW |
| Autofocus Precision | < 0.2 µm |
| Spatial Resolution | < 2 µm |
| Raman Shift Range | 80–9000 cm⁻¹ |
| Spectral Resolution | < 2.0 cm⁻¹ |
| Mapping Scan Area | > 300 × 300 mm² |
| Minimum Step Size | 1 µm |
| Compatible Wafer Sizes | 2", 4", 6", 8" (12" customizable) |
| Objective | 100× semi-apochromatic |
| Detection Mode | Confocal Raman + PL + Fluorescence Lifetime (TCSPC) |
| Software Compliance | Supports ASTM E2912, ISO/IEC 17025 workflows, GLP/GMP audit trail logging per FDA 21 CFR Part 11 requirements |
| Brand | ZOLIX |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Optical Defect Inspection System for Semiconductor Wafers |
| Model | SPM900 |
| Instrument Type | Steady-State and Time-Resolved Photoluminescence (PL) Mapping System |
| Excitation Wavelengths | 213 nm, 266 nm, 375 nm, 405 nm |
| Autofocus Accuracy | < 0.2 µm |
| Scan Range | > 300 × 300 mm² |
| Minimum Spatial Resolution | 1 µm |
| Compatible Wafer Sizes | 2", 4", 6", 8" (12" optional) |
| Objective Lenses | UV (5×), NUV (20×/100×), Visible (20×/50×/100×) |
| Spectrometer | 320 mm focal length, 1200 g/mm grating, spectral resolution ≤ 0.2 nm |
| PL Lifetime Range | 50 ps – 1 ms |
| Lifetime Precision | 8 ps |
| Detection Modes | Confocal steady-state PL, time-resolved PL (TRPL), fluorescence lifetime imaging (FLIM), Raman mapping, photocurrent mapping |
Show next