Coating Machine
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| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PTL-UMB |
| Price | Upon Request |
| Certifications | CE compliant |
| Power Supply | AC 220 V, 50 Hz, grounded |
| Operating Environment | Altitude < 1000 m |
| Dimensions (W×D×H) | 460 mm × 510 mm × 970 mm |
| Effective Immersion Length | 60 mm |
| Substrate Dimensions Supported | 75 mm × 25 mm × 2.5 mm |
| Withdrawal Speed Range | 1–500 µm/s |
| Temperature Control Range (Chamber) | RT + 5 to 100 °C |
| Temperature Uniformity | ±1.5 °C |
| Immersion/Drying Time Setting | 1–999 s |
| Cycle Count | 1–20 cycles |
| Control Interface | Color TFT touchscreen with PLC-based logic |
| Drive Mechanism | High-resolution stepper motor with suspended motor mount for vibration isolation |
| Standard Accessories | 1× substrate holder set, 1× liquid reservoir cup, 3× withdrawal wires |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | PTL-UMB01 |
| Pricing | Upon Request |
| Power Supply | AC 220 V, 50 Hz |
| Max. Sample Size | 200 × 150 × 5 mm |
| Travel Range | 220 mm |
| Dip Speed Range | 1–8000 µm/s (Resolution: 1 µm) |
| Temperature Control | RT–50 °C |
| Immersion/Drying Time | 1–999 s |
| Cycles | 1–20 |
| Load Capacity | ≤1000 g |
| Dimensions (W×D×H) | 480 × 480 × 880 mm |
| Weight | 60 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SPC-1 |
| Pricing | Upon Request |
| Max Print Area | 70 mm × 50 mm |
| Min Print Area | 16 mm × 12 mm |
| X/Y Adjustment Range | ±20 mm (±0.01 mm resolution) |
| Z Adjustment Range | 3 mm (±0.05 mm resolution) |
| Screen Angle Adjustment | ±10° |
| Substrate Holding | Vacuum Chuck |
| Frame Dimensions (Top Outer) | 180 mm × 130 mm |
| Frame Dimensions (Bottom Outer) | 125 mm × 108 mm |
| Overall Dimensions (Closed) | 300 mm × 240 mm × 170 mm |
| Overall Dimensions (Open) | 300 mm × 240 mm × 330 mm |
| Weight | 11 kg |
| Operating Ambient | Altitude < 1000 m, Temperature 10–40 °C, Relative Humidity 45–65 %RH |
| Power Supply | AC 380 V, 50 Hz, 63 A circuit breaker with dedicated earth ground |
| Cooling | Integrated recirculating chiller (deionized or distilled water) |
| Process Gas | High-purity argon (≥99.99 %), supplied via Ø6 mm double-ferrule fitting |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SPC-32 |
| Pricing | Upon Request |
| Power Supply | Single-phase AC 208–240 V, 50/60 Hz |
| Rated Power | 2500 W |
| Print Table Dimensions | 330 mm × 400 mm |
| Maximum Print Area | 200 mm × 300 mm |
| Print Height Adjustment Range | 30 mm |
| Production Throughput | 300–500 pcs/h |
| Repeatability Accuracy | ±0.03 mm |
| Environmental Operating Conditions | Altitude <1000 m |
| Cooling | Integrated recirculating chiller (deionized or purified water) |
| Gas Requirement | Argon purge (≥99.99% purity), supplied via external cylinder with Ø6 mm dual-ferrule compression fitting |
| Electrical Safety | Dedicated 63 A circuit breaker, mandatory earth grounding |
| Mechanical Guidance | Precision linear rails with variable-frequency motor drive |
| 刮刀 System | Pneumatically assisted floating squeegee assembly with adjustable pressure and stroke speed |
| Alignment | Micrometer-driven X/Y/Z fine alignment stage for PCB-to-screen registration |
| Dual-side Independent Adjustment | Left/right independent lateral offset control for asymmetric or multi-size mesh frame compatibility |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-100PA |
| Price | Upon Request |
| Vacuum Level | −0.08 MPa |
| Rotational Speed Range | 500–10,000 rpm |
| Speed Stability | ±1% |
| Programmable Steps | 6 per program × 12 stored programs |
| Acceleration/Deceleration Rate | 100–2,000 rpm/s per stage |
| Spin Duration per Stage | 0–60 s |
| Chamber Material | Polypropylene (PP) |
| Sample Holders | Two vacuum chucks (Φ19 mm and Φ60 mm) |
| Motor | 24 V DC brushless |
| Vacuum Pump | Oil-free dual-piston, ≥70 L/min |
| Operating Atmosphere | Ambient air or inert gas (N₂, Ar) |
| Control Interface | LCM display + microcontroller-based keypad |
| Dimensions (W×D×H) | 450 × 340 × 280 mm |
| Weight | 18 kg |
| Power Input | AC 220 V, 50 Hz, 10 A |
| Max. Power Consumption | ≤150 W (excl. external pump) |
| Environmental Operating Range | 0–45 °C, 10–85% RH (non-condensing) |
| Safety | Lid-open emergency deceleration, centering jig included |
| Compliance | Designed for GLP-compliant lab environments |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VTC-100PA-I |
| Pricing | Upon Request |
| Vacuum Level | −0.08 MPa |
| Rotational Speed Range | 500–10,000 rpm |
| Speed Stability | ±1% |
| Acceleration/Deceleration Rate | 100–2,000 rpm per stage |
| Program Storage | 12 user-defined programs (6 stages each) |
| Stage Duration | 0–60 s per stage |
| Heating Range | Ambient to 100 °C |
| Heating Accuracy | ±2 °C |
| Heating Power | 1000 W |
| Total Power Consumption | ≤1150 W (excl. vacuum pump) |
| Chamber Material | Polypropylene (PP) |
| Chuck Material | PTFE (Ø19 mm & Ø60 mm) |
| Vacuum Pump | Oil-free dual-piston, ≥70 L/min |
| Operating Atmosphere | Ambient air or inert gas (N₂, Ar) |
| Control Interface | LCM display + PCB-based microcontroller |
| Safety | Lid-open emergency deceleration |
| Dimensions (W×D×H) | 450 × 340 × 280 mm |
| Weight | 20 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Model | VTC-100PA-II |
| Vacuum Level | –0.08 MPa |
| Max. Spin Speed | 10,000 rpm |
| Speed Stability | ±1% |
| Speed Ramp Range | 100–2,000 rpm/step |
| Program Storage | 12 programs × 6 stages each |
| Spin Time per Stage | 0–60 s |
| Heating Range | Ambient to 200 °C |
| Heating Accuracy | ±2 °C |
| Heating Power | 1000 W |
| Chamber Material | Polypropylene (PP) |
| Chuck Material | PTFE (Ø19 mm & Ø60 mm) |
| Motor | 24 V DC brushless |
| Vacuum Pump | Oil-free dual-piston, ≥70 L/min |
| Dimensions (W×D×H) | 450 × 340 × 280 mm |
| Weight | 20 kg |
| Power Input | AC 220 V, 50 Hz, 10 A (host + heater) |
| Safety | Lid-interlock deceleration, inert gas compatibility (N₂/Ar), centering jig, chemical-resistant construction |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-100PAX |
| Quotation | Upon Request |
| Motor Power | 100 W |
| Input Power | 220 V, 50 Hz |
| Max Speed | 10,000 rpm |
| Min Speed | 500 rpm |
| Acceleration Range | 100–2,000 rpm/s |
| Program Steps per Recipe | 9 |
| Time per Step | 0–999 s |
| Stored Recipes | 6 |
| Vacuum Requirement | 0.06–0.09 MPa |
| Vacuum Port OD | 6 mm |
| Dimensions (W×D×H) | 270 × 430 × 400 mm |
| Weight | 12 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | VTC-16-3HD |
| Input Power | 2000 W (universal 110/220 V, 50 Hz) |
| Max DC Output | 1600 V / 50 mA |
| Sample Stage Diameter | 50 mm |
| Max Heating Temperature | 500 °C |
| Quartz Chamber Dimensions | Ø160 mm × 120 mm |
| Vacuum Pump | 120 L/min Rotary Vane Pump |
| Gas Inlet | Precision Adjustable Needle Valve for Argon (≥99.99% purity) |
| Target Size | Ø47 mm, Thickness 0.1–3 mm |
| Compatible Targets | Au, Ag, Pt, Cr, Ni |
| Excluded Materials | Oxides, Semiconductors, Al, Zn, C, Mg, Ti, Si |
| Footprint | 360 mm × 350 mm × 360 mm |
| Weight | 50 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | VTC-16-3HD |
| Input Power | 2000 W (universal 110/220 V, 50 Hz) |
| Max DC Output | 1600 V / 50 mA |
| Sample Stage Diameter | Ø50 mm |
| Max Heating Temperature | 500 °C |
| Sputtering Chamber Quartz Shield | Ø160 mm × 120 mm |
| Vacuum Pump | 120 L/min Rotary Vane Pump |
| Argon Purity Requirement | ≥99.99% |
| Target Dimensions | Ø47 mm, thickness 0.1–3 mm |
| Compatible Target Materials | Au, Ag, Pt, Cr, Ni |
| Excluded Materials | Al, Zn, C, oxides, semiconductors, light metals |
| Dimensions (W×D×H) | 360 mm × 350 mm × 360 mm |
| Weight | 50 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-16-D |
| Power Input | 220 V AC, 50/60 Hz |
| Max. Output | 500 VDC, 0–50 mA adjustable |
| Sputtering Time | 1–120 s adjustable |
| Chamber | Quartz tube, Ø166 mm OD × Ø150 mm ID × 150 mm H |
| Sealing | Stainless steel flat flange with Viton O-ring |
| Target Mount | 2-inch (Ø50 mm) magnetron cathode, target thickness 0.1–2.5 mm |
| Substrate Stage | Ø50 mm stainless steel, height adjustable from 30–80 mm |
| Max. Coating Area | Ø100 mm (4-inch equivalent) |
| Vacuum Performance | <1.0×10⁻² Torr (mechanical pump), <1.0×10⁻⁵ Torr (turbo-molecular pump optional) |
| Vacuum Interface | KF25 |
| Pressure Gauge | Digital vacuum gauge (Pa range) |
| Gas Inlet | 1/4" NPT port with front-panel flow control valve |
| Standard Target | Copper (Cu), ≥99.99% purity |
| Optional | Heated stage (up to 500 °C), additional sputtering targets (Au, Ag, Pt, Cr, Ti, etc.), in-situ film thickness monitor, Ar/N₂ gas compatibility |
| Dimensions | 460 × 330 × 540 mm (L×W×H) |
| Net Weight | 20 kg (excl. pump) |
| Certification | CE compliant |
| Warranty | 12 months parts & labor, lifetime technical support |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic (China) |
| Model | VTC-16-SM |
| Price | Upon Request |
| Input Power | 220 VAC, 50/60 Hz |
| Max Sputtering Current | 0–150 mA |
| Max Output Voltage | 1600 VDC |
| Max Power Consumption | <2 kW |
| Chamber | Quartz, Ø166 mm OD × Ø150 mm ID × 290 mm H |
| Sealing | Viton O-ring |
| Target | 2-inch water-cooled magnetron (1-inch optional) |
| Substrate Holder | Ø50 mm stainless steel, rotatable (0–5 RPM) |
| Target-to-Substrate Distance | Adjustable, 30–80 mm |
| Base Pressure (Mechanical Pump) | <1.0×10⁻² Torr |
| Base Pressure (Turbo-Molecular Pump) | <1.0×10⁻⁵ Torr |
| Vacuum Interface | KF25 |
| Pressure Gauge | Digital vacuum gauge (Pa range) |
| Process Gas | Argon (external cylinder with regulator required) |
| Gas Control | Manual needle valve + vent valve |
| Max Sputtering Area | 4-inch equivalent |
| Target Dimensions | Ø50 mm × 0.1–2.5 mm thickness |
| Compatible Materials | Au, Ag, Cu, Al, Ti, and other conductive metals |
| Control Panel | 6″ PLC-integrated touchscreen HMI |
| External Cooling | Recirculating chiller required (not included) |
| Dimensions (L×W×H) | 460 × 330 × 520 mm |
| Net Weight | 20 kg (pump & chiller excluded) |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Country of Origin | China |
| Model | VTC-1HD-ZF2 |
| Pricing | Upon Request |
| Vacuum Chamber | Ø324 × 330 mm |
| Ultimate Vacuum | ≤6.0 × 10⁻⁴ Pa (with FF-150 turbo-molecular pump + backing mechanical pump) |
| Leak Rate | ≤2.0 × 10⁻¹⁰ Pa·m³/s |
| Chamber Material | Electropolished 304 stainless steel |
| Sealing | Viton O-rings (movable joints), oxygen-free copper gaskets (static flanges) |
| Drive Mechanism | Magnetic coupling transmission |
| Magnetron Target | 2-inch (Ø50.8 mm), DC-powered, max. 240 W (water-cooled), operating pressure range: 0.2–10 Pa |
| Evaporation Source | Dual-electrode resistive boat (AC 0–8 V, up to 200 A, <1.6 kW), optimized for O₂-sensitive metals (Ti, Al, Au) |
| E-beam Source | Two positions (1 standard e-beam crucible, 3 cm³ capacity, 36 V / 500 W, 25–700 °C, ±0.5 °C control accuracy) |
| Substrate Stage | Ø120 mm, temperature-controlled (RT–500 °C), rotation speed 1–20 rpm, manual vertical adjustment (50 mm travel) |
| Quartz Crystal Monitor | EQ-TM106-1 thickness controller (6 MHz sensor, Al resolution: 0.0136 Å, accuracy ±0.5%, RS-232/485 interface, PWM analog output) |
| Gas Control | Single-channel mass flow controller (Ar only) |
| Viewport | Ø150 mm borosilicate glass window |
| Additional Port | One CF-35 flange for optional instrumentation |
| Cooling | Integrated KJ5000 chiller unit (deionized water or purified water required) |
| Power Input | AC 220 V / 50 Hz, total system load <3.5 kW |
| Dimensions (W×D×H) | ~1300 × 660 × 1200 mm |
| Weight | ~160 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-200 |
| Price | Upon Request |
| Power Supply | AC 220 V, 50 Hz |
| Max. Speed | 6000 rpm |
| Speed Stability | ±1% |
| Spin Time Range | 1–600 s (per stage) |
| Sample Holder Diameter | φ153 mm (6-inch), optional φ203.5 mm (8-inch) |
| Vacuum Requirement | ≥70 L/min |
| Dimensions (W×D×H) | 500 × 350 × 400 mm |
| Weight | 30 kg |
| Control | Microcontroller-based PCB with keypad & 7-segment LED display |
| Construction | Cast aluminum chassis |
| Rotation Direction | Counter-clockwise |
| Operating Environment | 0–45 °C, 10–85% RH (non-condensing) |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-200P |
| Pricing | Upon Request |
| Chamber Material | Polypropylene (PP) |
| Vacuum Adsorption Pressure | −0.08 MPa |
| Max Speed | 6000 rpm |
| Speed Stability | ±1% |
| Acceleration/Deceleration Rate | 100–2000 rpm/s per stage |
| Program Storage | 12 programs × 6 stages each |
| Stage Duration | 0–60 s |
| Power Supply | AC 220 V, 50 Hz (10 A), ≤150 W (host only) |
| Dimensions (Host) | Φ250 × 360 mm |
| (Controller) | 330 × 380 × 150 mm |
| Weight | 15 kg |
| Optional Heating | RT–100 °C (±2 °C accuracy, 1000 W heater, PTFE-coated heated chuck) |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | VTC-200PV |
| Maximum Rotation Speed | 6000 rpm |
| Acceleration/Deceleration Rate | 100–2000 rpm/s per stage |
| Programmable Stages | 12 programs × 6 stages each |
| Stage Duration | 0–60 s |
| Speed Stability | ±1% |
| Vacuum Capability | Chamber vacuum down to 5×10⁻² Pa (mechanical pump) |
| Sample chuck vacuum | −0.0933 MPa (oil-free diaphragm pump) |
| Chamber Material | Polypropylene (PP) |
| Power Supply | AC 220 V, 50 Hz, ≤150 W (host only) |
| Dimensions (Host) | Φ250 mm × 360 mm |
| Weight | 25 kg |
| Compliance | Full English UI, Lid-safety interlock, GLP-ready operation logging via optional PC interface |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-300USS |
| Power Input | AC 220 V, 250 W, 50/60 Hz |
| Max Substrate Diameter | 300 mm (12") |
| Max Spin Speed | 3000 rpm |
| Nebulizer Particle Size | 10–20 µm |
| Liquid Flow Rate | 0.6 pL–4 mL/min |
| Max Solid Content | ≤10 wt% |
| Max Solution Viscosity | ≤100 cP |
| Heating Capability | Optional heated substrate stage with IR lamp |
| Operating Environment | Altitude <1000 m, Ambient Temp. 25 °C ±15 °C, RH 55% ±10% |
| Pneumatic Requirement | Compressed air source (regulated, 0.4–0.6 MPa) required for nebulizer assist |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | VTC-300USS |
| Pricing | Available Upon Request |
| Input Voltage | 208–240 V AC, 50/60 Hz |
| Max Substrate Diameter | 300 mm (12") |
| Max Spin Speed | 3000 rpm |
| Nebulizer Particle Size | 10–20 µm |
| Solution Flow Rate | 0.6 pL–4 mL/min |
| Max Solid Content | ≤10 wt% |
| Max Solution Viscosity | ≤100 cP |
| Substrate Heating | Optional Integrated Hotplate or IR Lamp (Up to 200 °C) |
| Air Supply Required | Yes (Regulated Compressed Air, 0.4–0.6 MPa) |
| Operating Environment | Altitude <1000 m, Ambient Temp. 10–40 °C, RH 45–65% |
| Footprint | ≥2 m² |
| Ventilation | Local Exhaust Ventilation Recommended |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Model | VTC-50B |
| Power Supply | AC 220/110 V, 50/60 Hz |
| Rated Power | 150 W |
| Speed Range | 100–6000 rpm |
| Speed Stability | < ±1% |
| Speed Resolution | 1 rpm |
| Time Resolution | 1 s |
| Programmable Steps | 9 per program, up to 6 stored programs |
| Sample Holder Diameter | 90 mm |
| Max Substrate Size | 2-inch (50.8 mm) |
| Rotation Direction | Counter-clockwise |
| Chuck Runout (Axial) | ±2.5 µm |
| Chuck Runout (Radial) | ±1 µm |
| Operating Temperature | 5–40 °C |
| Relative Humidity | ≤85% RH |
| Dimensions (L×W×H) | 174 × 285 × 163 mm |
| Weight | 3 kg |
| Enclosure Material | Cast aluminum body with acrylic lid |
| Control System | Embedded microcontroller with EMI-resistant design |
| User Interface | English-language LCD touchscreen |
| Sample Fixation | Slot-based polypropylene chuck (no vacuum or adhesive required) |
| Environmental Requirement | Altitude ≤1000 m, ambient temp. 25 ±15 °C, humidity 55 ±10% RH |
| Noise Level | Low-noise operation via vibration-damping mounting |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | VTC-600-2HD |
| Target Configuration | 2 independent magnetron cathodes (1 × DC + 1 × RF) |
| Base Pressure | ≤5.0×10⁻³ Pa |
| Ultimate Vacuum | ≤5.0×10⁻⁴ Pa |
| Operating Pressure Range | 0.1–5 Pa |
| DC Power Supply | 0–500 W |
| RF Power Supply | 0–300 W |
| Substrate Heater | RT to 500 °C (±1 °C stability) |
| Rotating Sample Stage | Ø132 mm, 1–20 rpm |
| Adjustable Target-to-Substrate Distance | 85–115 mm |
| Film Uniformity | ±5% over Ø100 mm substrate |
| Gas Control | Dual-channel mass flow controllers (1–100 sccm & 1–200 sccm, Ar only |
| Cooling | Integrated recirculating chiller (KJ-5000, deionized water) |
| Vacuum Pumping System | Pfeiffer Hipace 80 turbomolecular pump + MVP015-2DC diaphragm backing pump |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | VTC-600-3HD |
| Target Configuration | 3 independent magnetron cathodes (2 × DC + 1 × RF) |
| Base Pressure | ≤5.0×10⁻³ Pa |
| Ultimate Vacuum | ≤5.0×10⁻⁴ Pa |
| Operating Pressure Range | 0.1–5 Pa |
| DC Power Supply | 2 units, 0–500 W each |
| RF Power Supply | 1 unit, 0–300 W, 13.56 MHz |
| Substrate Heater | RT to 500 °C, ±1 °C stability |
| Rotating Sample Stage | Ø132 mm, 1–20 rpm |
| Adjustable Target-to-Substrate Distance | 85–115 mm |
| Film Uniformity | ±5% over Ø100 mm substrate |
| Cooling | Integrated recirculating chiller (deionized water) |
| Gas Control | Dual-channel mass flow controllers (1–100 sccm & 1–200 sccm, Ar ≥99.999%) |
| Vacuum Chamber | Ø295 mm × 265 mm height |
| Pumping System | Pfeiffer Hipace 80 turbo-molecular pump (67 L/s) + MVP015-2DC diaphragm backing pump (1 m³/h) |
| Total Weight | 160 kg (excl. chiller) |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Origin Category | Domestic (China) |
| Model | VTC-600-3HD-1000 |
| Input Power | 220 V / 50 Hz |
| Number of Sputtering Targets | 3 |
| Chamber Inner Diameter | Ø300 mm |
| Target Cooling | Water-Cooled |
| Ultimate Vacuum | 7.4 × 10⁻⁵ Pa |
| Vacuum Chamber Dimensions | Φ300 × 330 mm |
| Vacuum System | VRD-16 Rotary Vane Pump + FF-100/150 Turbo-Molecular Pump |
| Pump-Down Time | ≤30 min (from atmosphere to 5.0 × 10⁻³ Pa) |
| Gas Inlet System | Dual Mass Flow Controllers (Ar: 100 sccm + 200 sccm |
| Target Size | Φ2 inch (50.8 mm), thickness 0.1–5 mm |
| Substrate Holder | Φ70 mm, heated (RT to 1000 °C) |
| Overall Dimensions | 900 mm (W) × 650 mm (D) × 1100 mm (H) |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VTC-600GC-AM |
| Vacuum Base Pressure | 6.0 × 10⁻⁵ Pa |
| Leak Rate | ≤0.5 Pa/h |
| Pump-Down Time (Atm → 5.0 × 10⁻³ Pa) | ~5 min |
| Vacuum System | Dual-stage (Mechanical Pump + Turbomolecular Pump) |
| Substrate Holder Diameter | φ140 mm |
| Substrate Temperature Range | Ambient to 500 °C (±1 °C control accuracy) |
| Substrate Rotation Speed | 5–20 rpm |
| Gas Inlet Channels | 2 (Mass Flow Controllers for Ar and N₂) |
| Target-to-Substrate Angle | 34° |
| Number of Target Positions | 3 (120° spacing, customizable) |
| Target Cooling | Water-cooled |
| Target Diameter | 2″ (φ50.8 mm), Thickness: 0.1–5 mm |
| Optional Features | RF Power Supply (for insulating targets), DC Power Supply (for conductive targets), Substrate Bias Module |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VTC-600GD |
| Vacuum Base Pressure | ≤8.0×10⁻⁵ Pa |
| Chamber Inner Diameter | Ø300 mm |
| Substrate Heater Temperature Range | RT–500 °C (±1 °C) |
| Max. Number of Sputter Targets | 4 |
| DC Sputtering Power | Up to 500 W (optional) |
| RF Sputtering Power | Up to 300 W |
| Substrate Holder Diameter | Ø140 mm |
| Substrate Rotation Speed | 1–20 rpm |
| Cooling Method | Water-cooled targets |
| Target Size | Ø2″ (50.8 mm), thickness 0.1–5 mm |
| Gas Inlet Control | Dual MFCs (100 SCCM + 200 SCCM) |
| Process Gases | Ar, N₂, or other inert gases |
| Total Power Consumption | <3.5 kW |
| Dimensions (Main Unit) | 850×760×660 mm |
| Overall Dimensions | 1300×660×1200 mm |
| Weight | 190 kg |
| Brand | Kaufman |
|---|---|
| Origin | USA |
| Model | eH 1000 |
| Discharge Voltage | 50–300 V DC |
| Discharge Current | up to 10 A |
| Beam Divergence (HWHM) | >45° |
| Anode Diameter | ~5 cm |
| Physical Dimensions | Ø5.7" × H5.5" |
| Compatible Gases | Ar, Xe, Kr, O₂, N₂, organic precursors |
| Mounting Options | flange-mounted (CF, ISO-K, or custom), no water cooling required |
| Operating Pressure Range | 1×10⁻⁴ – 5×10⁻³ Torr |
| Typical Applications | ion-assisted deposition (IAD), in-situ pre-cleaning, low-energy sputter etching, surface activation |
| Brand | Kaufman & Robinson, Inc. |
|---|---|
| Origin | USA |
| Model | eH 2000 |
| Cooling | Water-cooled |
| Discharge Voltage Range | 50–300 V DC |
| Discharge Current | Up to 15 A |
| Beam Divergence (HWHM) | >45° |
| Anode Diameter | ~5 cm |
| Physical Dimensions | Ø5.7" × H5.5" |
| Compatible Gases | Ar, Xe, Kr, O₂, N₂, Organic Precursors |
| Mounting Interface | Conflat or Quick-Connect Flange |
| Operating Pressure Range | 1×10⁻⁴ – 1×10⁻² Torr |
| Power Supply | eHx-30010A DC Magnetic Confinement Controller |
| Optional Features | Adjustable-angle mount, Sidewinder filament cathode, Grooved anode, eH 2000L / eH 2000x02 / eH 2000 LEHO variants |
| Brand | Kaufman & Robinson, Inc. (KRI) |
|---|---|
| Origin | USA |
| Model | eHL400-2 / eHL400-3 / eHL400-4 / eHL400-5 |
| Anode Configuration | Standard or Grooved |
| Cathode/Neutralizer | Filamentless |
| Beam Divergence (HWHM) | >45° |
| Operating Gases | Ar, Xe, Kr, O₂, N₂, and organic precursors |
| Discharge Voltage/Current | 50–300 eV / up to 5 A |
| Module Dimensions (per eH400 unit) | Ø94 mm × H76 mm |
| Total Source Length | Up to 1000 mm (modular assembly) |
| Orientation | Vertical or Horizontal |
| Power Supply | eH Plasma Power Pack (eHL-30010A), DC magnetic confinement, 40–200 VDC |
| Mounting | Movable base or quick-connect flange |
| Compliance | Designed for integration into UHV and HV vacuum systems per ISO 3529-3, ASTM F1180, and SEMI E10 standards |
| Brand | Kaufman |
|---|---|
| Origin | USA |
| Model | eH3000 |
| Discharge Voltage/Current | 50–300 V / up to 20 A |
| Beam Diameter | ~7 cm |
| Beam Divergence (HWHM) | >45° |
| Cooling | Water-cooled front plate |
| Compatible Gases | Ar, Xe, Kr, O₂, N₂, organic precursors |
| Mounting Flange | Quick-connect or movable base |
| Height | 4.0 in |
| Diameter | 5.7 in |
| Anode Type | Modular, standard or grooved |
| Cathode Options | Filament, Sidewinder filament, or hollow cathode |
| Gas Control | Up to 4 independent gas channels |
| Installation Distance | 16–45 in |
| Application Scope | Ion-assisted deposition (IAD), ion beam sputtering (IBS), ion beam assisted deposition (IBAD), surface activation, direct ion beam deposition (DD), optical coating, thin-film densification |
| Brand | Kaufman & Robinson, Inc. (KRI) |
|---|---|
| Origin | USA |
| Model | Gridless eH Series |
| Anode Voltage Range | 50–300 V (varies by model) |
| Beam Current | 5–20 A |
| Beam Divergence Angle | >45° |
| Gas Flow Rate | 2–100 sccm (model-dependent) |
| Physical Dimensions | 3.0″–9.7″ diameter, 3.0″–6.0″ height |
| Cooling | Optional water cooling (standard on eH2000 and above) |
| Neutralizer Options | Filament (F) or Hollow Cathode (HC) |
| Brand | KRI (Kaufman & Robinson, Inc.) |
|---|---|
| Origin | USA |
| Model | KDC Series (KDC-10, KDC-40, KDC-75, KDC-100, KDC-160) |
| Beam Current | >10–650 mA |
| Beam Energy | 100–1200 V |
| Grid Diameter | 1–16 cm Φ |
| Operating Pressure | < 0.5 mTorr |
| Compatible Gases | Ar, Kr, Xe, O₂, N₂, H₂ |
| Gas Flow Rate | 1–30 sccm |
| Length | 11.5–25.2 cm |
| Diameter | 4–23.2 cm |
| Neutralizer | Thermionic Filament Type |