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| Brand | Durham Magneto Optics |
|---|---|
| Origin | United Kingdom |
| Model | MicroWriter ML3 |
| Exposure Mode | Projection-Based |
| Resolution Options | 0.6 µm, 1 µm, 2 µm, 5 µm |
| Light Source | LED |
| Wavelengths | 385 nm and 405 nm |
| Maximum Exposure Area | 195 mm × 195 mm |
| Dimensions | 700 mm × 700 mm × 700 mm |
| Software Platform | Windows 10-native MicroWriter Control Suite with Clewin GDS/DXF Import |
| Alignment Microscope | Motorized Zoom (×3/×5/×10/×20), Auto-Switching |
| Overlay Accuracy | ±0.5 µm (Flagship Configuration) |
| Z-Axis Positioning Resolution | 50 nm |
| Optical Profilometry Vertical Resolution | 100 nm |
| Grayscale Lithography Support | 255-level intensity modulation |
| Stage Minimum Step Size | 50 nm |
| Auto-Focus | Real-time FocusLock™ Surface Height Mapping and Z-Compensation |
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