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| Brand | Moorfield |
|---|---|
| Origin | United Kingdom |
| Model | nanoEM |
| Target Material | Metal |
| Target Diameter | 2 inch |
| Control System | Fully Automatic Touchscreen Interface |
| Chamber Volume | 13 L |
| Sample Stage Diameter | 3 inch |
| Sputtering Gas | Argon (Ar) |
| Base Pressure | <5×10⁻⁷ mbar |
| DC Sputtering Power Output | Up to 300 W |
| Vacuum Pump Options | Configurable |
| Optional Features | Stage Rotation & Tilt, Plasma Glow Monitoring, Quartz Crystal Thickness Monitor, Pneumatic Shutter, Viewport, Auto Pressure Control |
| Compliance | Designed for ISO Class 5 cleanroom compatibility |
| Safety | Interlocked chamber door, overpressure/overtemperature protection, real-time arc suppression |
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