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| Brand | FRT |
|---|---|
| Origin | Germany |
| Model | MicroProf MHU |
| Wafer Handling | Semi-Automatic with Material Handling Unit (MHU) |
| Throughput | Up to 220 wafers/hour |
| Wafer Diameter Support | 2″ to 8″ |
| Cassette Capacity | Up to 4 open FOUPs/SMIF pods |
| Integrated Options | Pre-aligner, OCR reader |
| Application Focus | Semiconductor, MEMS, Sapphire, LED wafer manufacturing |
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