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| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | Gemini |
| Price Range | USD $65,000 – $130,000 |
| Instrument Type | Multi-Axis Nanomechanical Testing System |
| Maximum Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range | 50 µm |
| Displacement Resolution | 4 nm |
| Maximum Friction Force | 50 mN |
| Indenter Tip Material | Single-Crystal Diamond |
| Brand | FemtoTools |
|---|---|
| Origin | Switzerland |
| Model | FT-G Series Nanotweezers (FT-G30, FT-G60, FT-G100) |
| Compatible Systems | FT-GS1000 Micro-Nano Assembler, FT-GS5000 Nano Assembly System |
| Controller | FT-GC01 Nanotweezer Controller |
| Operating Environments | Ambient air, liquid, and high vacuum (SEM-compatible) |
| Force Feedback | Integrated capacitive force sensor (FT-G30 & FT-G100) |
| Displacement Resolution | <1 nm |
| Force Resolution | <100 pN |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iNano |
| Maximum Force | 50 mN |
| Force Resolution | 3 nN |
| Force Noise | <200 nN (RMS) |
| Time Constant | 20 µs |
| Maximum Indentation Depth | 50 µm |
| Displacement Noise | <0.1 nm |
| Digital Displacement Resolution | 0.02 nm |
| Drift Rate | <0.05 nm/s |
| Dynamic Frequency Range | 0.1 Hz – 1 kHz |
| Z-Stage Travel | 25 mm |
| X-Stage Travel | 100 mm |
| Y-Stage Travel | 150 mm |
| Load Frame Stiffness | >1,000,000 N/m |
| Scratch Max Normal Load | 50 mN |
| Scratch Max Distance | 2.5 mm |
| Scratch Max Speed | 500 µm/s |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | InSEM HT |
| Instrument Type | High-Temperature In-Situ Nanoindentation and Mechanical Testing System for SEM/FIB Integration |
| Maximum Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range (X/Y) | 20 mm, (Z): 25 mm |
| Displacement Resolution | 4 nm |
| Maximum Friction Force | 0.05 N |
| Indenter Type | Diamond Berkovich / Cube-Corner / Spherical |
| Thermal Drift | < 0.05 nm at 800 °C |
| Operating Temperature Range | RT to 800 °C under vacuum |
| Compatibility | Integrated with SEM, FIB, or standalone high-vacuum chamber |
| Standards Compliance | ISO 14577-1/2/3, ASTM E2546, applicable to GLP/GMP-relevant mechanical property validation workflows |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | iMicro |
| Maximum Load Capacity | 1 N |
| Force Resolution | 6 nN |
| Force Noise Floor | <200 nN |
| Indentation Depth Range | up to 80 µm |
| Depth Resolution | 0.04 nm |
| Depth Drift Rate | <0.05 nm/s |
| Time Constant | 20 µs |
| Scratch Option | up to 50 mN load, 2.5 mm lateral displacement, 500 µm/s max speed |
| Stage Travel (X/Y/Z) | 100 mm × 150 mm × 25 mm |
| Load Stiffness | >3,500,000 N/m |
| Tip Calibration | Integrated TiP-Calibration system |
| Software Platform | InView (scriptable experiment design), optional NanoBlitz 3D topography & tomography module |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | NanoFlip |
| Price Range | USD 260,000–390,000 (est.) |
| Instrument Type | In-Situ Nanomechanical Testing System |
| Max Indentation Depth | 50 µm |
| Effective Load Range | 50 mN |
| Load Resolution | 3 nN |
| Displacement Range (X/Y) | 20 mm, (Z): 25 mm |
| Displacement Resolution | 4 nm |
| Max Friction Force | 0.05 N |
| Indenter Tip | Diamond Berkovich or Cube-Corner |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Nano Indenter G200 |
| Force Range | 10 nN – 10 N (with modular transducers) |
| Displacement Resolution | < 0.01 nm |
| Maximum Indentation Depth | > 500 µm |
| Testing Speed | Up to 1 indentation point per second |
| Brand | Appo |
|---|---|
| Origin | Switzerland |
| Model | MTA03 |
| Load Range | ±200 mN |
| Load Resolution | 0.5 nN |
| Displacement Range | 0.1 nm to 29 mm |
| Displacement Resolution (short-range) | 0.1 nm |
| Displacement Resolution (long-range) | 1 nm |
| Microscope Working Distance | 95 mm |
| Camera | 3 MP CMOS USB |
| Optical Zoom | 7:1 motorized |
| Illumination Options | Coaxial lens, ring light, diffuse backlight |
| Probe Types | Multiple FT-S microforce sensing probes |
| Optional Modules | FT-G microtweezers for microassembly |
| Brand | SHNTI (Distributor) |
|---|---|
| Origin | Switzerland |
| Model Series | FT-RS / FT-FS / FT-S / FT-G / FT-UMS1000 |
| Instrument Type | Nanoindentation and Scratch Tester |
| Maximum Indentation Depth | 1 µm |
| Effective Load Range | 5 nN – 10 mN |
| Load Resolution | 1 nN |
| Displacement Range | ±100 µm |
| Displacement Resolution | 5 nm |
| Maximum Friction Force | 1 mN |
| Indenter Tip Types | Berkovich, Cube-Corner, Flat Punch, Spherical (customizable) |
| Thermal Drift | <0.1 nm/s (at 25 °C, stabilized environment) |
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