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| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | EPS Series |
| Price Range | USD $65,000 – $130,000 (FOB USA) |
| Product Category | RF-Compatible Manual Probe Station |
| Operation Mode | Manual |
| Base Platform | 150 mm Wafer-Capable |
| Max XY Travel | 155 mm × 155 mm |
| Minimum Positioning Resolution | 5 µm |
| Theta Rotation | 360° Continuous |
| Z-Axis Vertical Travel | 10 mm |
| Standard Base Dimensions | 490 mm × 490 mm × 480 mm (W × D × H) |
| Brand | SHNTI |
|---|---|
| Origin | Shanghai, China |
| Model | M-Series |
| Operation Type | Manual |
| Maximum Wafer Size | 150 mm (6-inch) and 100 mm (4-inch) |
| Probe Compatibility | DC to 67 GHz RF, MEMS, and Surface Resistivity Measurements |
| Target Pad Size | ≥30 µm |
| Application Scope | Academic Teaching, R&D Lab Characterization, Low-Volume IC Device Evaluation |
| Brand | SHNTI |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Surface Resistivity Probe Station |
| Operation Mode | Manual |
| Compatible Wafer Sizes | 4", 6", 8", 12" |
| Modular Expansion Support | mmWave (mmW), Failure Analysis (FA), MEMS, Wafer-Level Reliability (WLR), Optoelectronics |
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