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| Brand | KLA |
|---|---|
| Origin | Fujian, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | R50 |
| Price Range | USD $42,000 – $140,000 (FOB) |
| Automation Level | Fully Automated |
| Sheet Resistance Range | 5 mΩ/□ to 5 MΩ/□ |
| Measurement Accuracy | ±1% |
| Repeatability | <0.2% |
| XY Stage Options | 100 mm × 100 mm or 200 mm × 200 mm |
| Maximum Sample Diameter | 200 mm |
| Measurement Modes | Contact Four-Point Probe (4PP) and Non-Contact Eddy Current (EC) |
| Mapping Configurations | Linear, Rectangular, Polar, and User-Defined Grids |
| Compliance | ASTM F84, ISO 10474, SEMI MF67, USP <1031>, GLP/GMP-ready audit trail support |
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