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| Brand | SHNTI |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | VIL1000 |
| Light Source | Coherent Laser (UV/Deep-UV or Visible, Configurable) |
| Minimum Achievable Line Width | <50 nm |
| Grating Period Range | 240–1500 nm |
| Maximum Exposure Field | 200 mm × 200 mm (8-inch wafer compatible) |
| Pattern Reconfigurability | Real-time, maskless, via beam steering optics |
| Positioning Accuracy | Sub-10 nm (closed-loop piezo stage) |
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