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| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Nanofocus μSurf |
| Pricing | Upon Request |
| Brand | LUMINA |
|---|---|
| Origin | USA |
| Model | AT1 |
| Type | Non-contact Profilometer / Surface Metrology System |
| Measurement Principle | Multi-modal Optical Scattering, Ellipsometry, Reflectometry, and Surface Slope Analysis |
| Sample Compatibility | Transparent (e.g., fused silica, sapphire, glass), semi-transparent (e.g., GaN, SiC), and opaque substrates (e.g., Si, GaAs, InP, metals) |
| Scan Area | Up to 300 × 300 mm |
| Wafer Handling | Supports 150 mm wafers (full-surface scan in ≤ 3 min), 50 × 50 mm samples in ≤ 30 s |
| Detection Sensitivity | Sub-nanometer vertical resolution for film thickness uniformity |
| Mechanical Architecture | Fixed-optics, non-rotating platform with high inertial damping |
| Regulatory Alignment | Designed for GLP/GMP-compliant environments |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | ZETA-20 |
| Product Type | Non-contact Optical Profilometer / Surface Roughness Analyzer |
| Operating Principle | White-light Interferometry |
| Key Imaging Technology | ZDot™ 3D Imaging |
| Vertical Resolution | Sub-Ångström (≤0.1 nm) |
| Measurement Modes | Six Integrated Optical Modules |
| Surface Reflectivity Range | 0.5% – >85% |
| Output | True-color 2D/3D Images |
| Compliance | ASTM E2921, ISO 25178-2, ISO 4287, USP <1056>, FDA 21 CFR Part 11 Ready (via optional software module) |
| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | NanoFocus μScan |
| Product Type | Non-Contact Profilometer / Surface Roughness Analyzer |
| Scan Modules | SC 50 (50×50 mm XY range, 0.5 µm XY resolution, 100 mm Z positioning, 50 mm/s max speed) |
| Z-Sensors | Confocal Point (CF 4: 0.02 µm Z res, 1 µm XY res, 4 mm WD, 1.0 mm Z range |
| CF 13 | same Z res, 13 mm WD) |
| Autofocus (AF 2 | 0.025/0.011 µm Z res, 2 mm Z range, dual WD modes) |
| Chromatic White Light (CRT 5 | 0.010 µm Z res, 4 µm XY res, 5 mm Z range, 0.3 mm WD) |
| Holographic (CP 15 | 3.0 µm Z res, 12 µm XY res, 12 mm Z range) |
| System Controller | Industrial PC with Windows XP Professional, DVD writer, Ethernet |
| Mechanical Platforms | MT 70 cabinet (1550×800×750 mm), MP 100 granite stand (660×450×497 mm) for SC 50–SC 150, MP 200 (680×480×385 mm) for SC 200 |
| Software | NF μsoft (DIN EN ISO-compliant roughness analysis, profile & topography rendering), NF 3D-Plus (OpenGL-based photorealistic 3D visualization), NF ActiveX (VBA/Excel integration), NF Hybridmaster (SMT thick-film SPC & teach-in), NF Flatmaster (flatness/warpage automation), NF Solder (offline solder paste inspection), NF AutoScan (arbitrary-point profiling) |
| Brand | KLA |
|---|---|
| Model | Profilm 3D |
| Type | Non-contact Optical Profilometer / Surface Roughness Analyzer |
| Measurement Principle | White Light Interferometry (WLI) with Vertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI) |
| Vertical Range | VSI: 50 nm – 100 mm |
| PSI | 0 – 3 µm |
| Reflectance Range | 0.05% – 100% |
| Piezo Scan Range | 500 µm |
| XY Stage Travel | 100 mm × 100 mm |
| Compliance | ISO 25178-604, ISO 4287, ISO 4288, ASME B46.1, ASTM E2923 |
| Software | ProfilmOnline™ Cloud-Based Analysis Platform |
| Data Export | CSV, TIFF, BMP, OBJ, STP, DXF |
| Roughness Parameters | 47 ISO/ASME/EUR-compliant parameters |
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