Empowering Scientific Discovery

Shanghai Naton Instruments Co., Ltd.

Categories
  • All
  • Favorite
  • Popular
  • Most rated
Added to wishlistRemoved from wishlist 0
Add to compare
OriginGermany
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelNanofocus μSurf
PricingUpon Request
Added to wishlistRemoved from wishlist 0
Add to compare
BrandLUMINA
OriginUSA
ModelAT1
TypeNon-contact Profilometer / Surface Metrology System
Measurement PrincipleMulti-modal Optical Scattering, Ellipsometry, Reflectometry, and Surface Slope Analysis
Sample CompatibilityTransparent (e.g., fused silica, sapphire, glass), semi-transparent (e.g., GaN, SiC), and opaque substrates (e.g., Si, GaAs, InP, metals)
Scan AreaUp to 300 × 300 mm
Wafer HandlingSupports 150 mm wafers (full-surface scan in ≤ 3 min), 50 × 50 mm samples in ≤ 30 s
Detection SensitivitySub-nanometer vertical resolution for film thickness uniformity
Mechanical ArchitectureFixed-optics, non-rotating platform with high inertial damping
Regulatory AlignmentDesigned for GLP/GMP-compliant environments
Added to wishlistRemoved from wishlist 0
Add to compare
BrandKLA
OriginMalaysia
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelZETA-20
Product TypeNon-contact Optical Profilometer / Surface Roughness Analyzer
Operating PrincipleWhite-light Interferometry
Key Imaging TechnologyZDot™ 3D Imaging
Vertical ResolutionSub-Ångström (≤0.1 nm)
Measurement ModesSix Integrated Optical Modules
Surface Reflectivity Range0.5% – >85%
OutputTrue-color 2D/3D Images
ComplianceASTM E2921, ISO 25178-2, ISO 4287, USP <1056>, FDA 21 CFR Part 11 Ready (via optional software module)
Added to wishlistRemoved from wishlist 0
Add to compare
OriginGermany
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelNanoFocus μScan
Product TypeNon-Contact Profilometer / Surface Roughness Analyzer
Scan ModulesSC 50 (50×50 mm XY range, 0.5 µm XY resolution, 100 mm Z positioning, 50 mm/s max speed)
Z-SensorsConfocal Point (CF 4: 0.02 µm Z res, 1 µm XY res, 4 mm WD, 1.0 mm Z range
CF 13same Z res, 13 mm WD)
Autofocus (AF 20.025/0.011 µm Z res, 2 mm Z range, dual WD modes)
Chromatic White Light (CRT 50.010 µm Z res, 4 µm XY res, 5 mm Z range, 0.3 mm WD)
Holographic (CP 153.0 µm Z res, 12 µm XY res, 12 mm Z range)
System ControllerIndustrial PC with Windows XP Professional, DVD writer, Ethernet
Mechanical PlatformsMT 70 cabinet (1550×800×750 mm), MP 100 granite stand (660×450×497 mm) for SC 50–SC 150, MP 200 (680×480×385 mm) for SC 200
SoftwareNF μsoft (DIN EN ISO-compliant roughness analysis, profile & topography rendering), NF 3D-Plus (OpenGL-based photorealistic 3D visualization), NF ActiveX (VBA/Excel integration), NF Hybridmaster (SMT thick-film SPC & teach-in), NF Flatmaster (flatness/warpage automation), NF Solder (offline solder paste inspection), NF AutoScan (arbitrary-point profiling)
Added to wishlistRemoved from wishlist 0
Add to compare
BrandKLA
ModelProfilm 3D
TypeNon-contact Optical Profilometer / Surface Roughness Analyzer
Measurement PrincipleWhite Light Interferometry (WLI) with Vertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI)
Vertical RangeVSI: 50 nm – 100 mm
PSI0 – 3 µm
Reflectance Range0.05% – 100%
Piezo Scan Range500 µm
XY Stage Travel100 mm × 100 mm
ComplianceISO 25178-604, ISO 4287, ISO 4288, ASME B46.1, ASTM E2923
SoftwareProfilmOnline™ Cloud-Based Analysis Platform
Data ExportCSV, TIFF, BMP, OBJ, STP, DXF
Roughness Parameters47 ISO/ASME/EUR-compliant parameters
Show next
InstrumentHive
Logo
Compare items
  • Total (0)
Compare
0