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| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D600/P-7 |
| Measurement Principle | Mechanical Stylus Profiling with Optical Reflectance Height Detection |
| Vertical Measurement Range | 0.1 nm to 1200 µm |
| Vertical Accuracy | ±0.1 µm |
| Probe Normal Force | 0.03–15 mg |
| Maximum Scan Length | 55 mm (D600), 150 mm (P-7) |
| Step Height Repeatability | 0.10% (1σ) |
| Vertical Resolution | 0.38 Å |
| Maximum Sample Size | 200 mm diameter |
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