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| Brand | Makeway |
|---|---|
| Origin | Shanghai, China |
| Model | MKW-KP004 |
| Probe Count | 9 integrated Kelvin probes |
| Maximum Substrate Size | 300 mm (12-inch) wafers |
| Energy Resolution | < 1 meV |
| Probe Tip Diameter | 1.4 mm (metal) |
| Angular Position Sensing Resolution | 1° |
| X-Axis Motorized Travel | > 100 mm, Positioning Accuracy: ±50 µm |
| Rotational Axis | Motorized silicon wafer stage with integrated optical encoder |
| Dead-Zone Minimization | Optimized for small wafers and wafer fragments |
| Work Function Calibration Reference | Integrated HOPG or Au reference |
| Environmental Monitoring | Onboard USB-connected temperature & humidity sensor |
| Faraday Cage | Fully integrated gold-plated steel enclosure |
| Software Control | Scriptable measurement engine supporting user-defined protocols |
| Data Output | Full-wafer, half-wafer, quarter-wafer, line-scan, and point-mode surface potential maps |
| Compliance Framework | Designed for GLP-aligned lab environments |
| Brand | KP (UK) |
|---|---|
| Origin | United Kingdom |
| Model | HVKP |
| Vacuum Compatibility | UHV (≤1×10⁻¹⁰ mbar) |
| Measurement Principle | Non-contact, vibrating capacitor-based Kelvin probe force microscopy (KPFM) with off-null detection |
| Work Function Resolution | 1–3 meV (2 mm tip), 5–10 meV (50 µm tip) |
| Tip-to-Sample Distance Control | Down to 400 nm with patented Height Regulation (HR) mode |
| Spatial Resolution | Sub-micron (dependent on tip geometry and vacuum conditions) |
| Detection Mode | Off-Null (ON) signal amplification |
| Actuation | Voice-coil (VC) driver |
| Data Output | Digital export to Excel, Origin, or third-party analysis software |
| Compliance | Designed for GLP/GMP-aligned surface science workflows |
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