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Shanghai Microwell Semiconductor Technology Co., Ltd.

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BrandAngstrom
OriginUSA
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelLEED 800
PricingUpon Request
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BrandAngstrom
OriginUSA
Manufacturer TypeAuthorized Distributor
Origin CategoryImported Instrument
ModelELS5000
PricingUpon Request
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BrandAngstrom (USA)
OriginUSA
Manufacturer TypeAuthorized Distributor
Origin CategoryImported Instrument
ModelLUMO
PricingUpon Request
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BrandAngstrom (USA)
OriginUSA
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelRVL2000
PricingUpon Request
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BrandPHI
OriginJapan
ModelGenesis 500
TypeFully Automated Scanning Focused XPS System
Sample StageMotorized 3-Position Carousel (80 mm × 80 mm trays)
Microprobe Spot Size≤ 5 µm
Depth ProfilingIntegrated High-Performance Ar⁺ Ion Gun + Dual-Beam Charge Neutralization
Optional TechniquesUPS, LEIPS, REELS, AES, HAXPES, GCIB Sputtering
Software PlatformPHI SmartSoft Suite with GLP/GMP-Compliant Audit Trail & 21 CFR Part 11 Support
ComplianceASTM E1521, ISO 18118, ISO 21365, USP <1057>, IEC 62304
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BrandPHI
OriginJapan
ModelPHI 700
TypeScanning Auger Electron Spectrometer
Detection PrincipleAuger Electron Spectroscopy (AES)
Spatial Resolution<10 nm (beam diameter)
Energy Resolution≤0.3% at E₀ = 1 keV
Ion Sputtering Energy Range0.1–5 keV
Maximum Magnification>500,000×
Depth Profiling CapabilitySub-nanometer to several micrometers
Sample StageHigh-precision motorized XYZ + tilt/rotation
Vacuum SystemUltra-high vacuum (UHV), base pressure ≤2×10⁻¹⁰ Torr
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BrandMakeway
OriginShanghai, China
ModelMKW-5250
Energy Resolution40 meV
X-ray SourceAl Kα (1486.6 eV)
Spatial Resolution≤ 5 µm (focused monochromated beam)
Analysis AreaUp to 300 µm × 300 µm
Detection Sensitivity11,800 kcps (for C 1s at pass energy 20 eV)
Sample StageMotorized XYZ + tilt/rotation
Compatible TechniquesXPS, UPS, LEIPS, REELS, AES, HAXPES (with optional Cr/Mg anode), GCIB depth profiling, angle-resolved XPS (AR-XPS)
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