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| Brand | ULTECH |
|---|---|
| Origin | South Korea |
| Model | MPS |
| Category | Vacuum Probe Station |
| Operation | Manual |
| Wafer Size Compatibility | 1″ to 8″ |
| Temperature Range Options | −40 °C to 200 °C (Peltier), −40 °C to 170 °C (Peltier), RT to 450 °C (Ceramic Heater), RT to 750 °C (Ceramic Heater), 77 K to 300 K (Liquid Nitrogen Cooling) |
| Vacuum Chamber | Yes, hermetic sealing |
| Gas Delivery | Mass Flow Controller (MFC)-equipped multi-gas inlet |
| Optical Access | Integrated viewport for microscope coupling |
| Electrical Interface | Standard coaxial and triaxial feedthroughs |
| Brand | MicroXact |
|---|---|
| Model | MPS-C-300 |
| Category | RF Probe Station |
| Wafer Size Capacity | Up to 200 mm (standard 10–150 mm) |
| Magnetic Field Range | ±6 kOe (±0.6 T) in 3D vector configuration |
| Field Directional Accuracy | ±1.0° |
| Field Uniformity | ±2% over 10 mm diameter |
| Field Stability | <0.1% over 24 h |
| Minimum Field Resolution | 200 mG |
| Frequency Bandwidth | DC to ~67 GHz |
| Motion Range (X-Y) | 100 mm × 100 mm |
| Chuck Type | Isolated / Grounded / Coaxial configurable |
| Control Software | LabVIEW-based, open-source, modular API |
| Brand | ULTECH |
|---|---|
| Origin | South Korea |
| Model | Micro-110 |
| Product Category | Vacuum Probe Station |
| Operation Type | Manual |
| Wafer Size Compatibility | 1–8 inch |
| Temperature Range Options | (a) –40 °C to 200 °C (Peltier), (b) –40 °C to 170 °C (Peltier), (c) RT to 450 °C (Ceramic Heater), (d) RT to 750 °C (Ceramic Heater), (e) 77 K to 300 K (Liquid Nitrogen Cryostat) |
| Vacuum Chamber | Hermetic Sealed with Optical Viewports |
| Gas Delivery | Mass Flow Controller (MFC)-Equipped Multi-Gas Inlet |
| Electrical Interface | Standard Coaxial & Triaxial Feedthroughs |
| Pricing | USD $150,000–$250,000 |
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