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| Brand | PHI |
|---|---|
| Origin | Japan |
| Model | PHI 700 |
| Type | Scanning Auger Electron Spectrometer |
| Detection Principle | Auger Electron Spectroscopy (AES) |
| Spatial Resolution | <10 nm (beam diameter) |
| Energy Resolution | ≤0.3% at E₀ = 1 keV |
| Ion Sputtering Energy Range | 0.1–5 keV |
| Maximum Magnification | >500,000× |
| Depth Profiling Capability | Sub-nanometer to several micrometers |
| Sample Stage | High-precision motorized XYZ + tilt/rotation |
| Vacuum System | Ultra-high vacuum (UHV), base pressure ≤2×10⁻¹⁰ Torr |
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